Penn Regional Nanotechnology Facility

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	Electron Microscopy

	Focused Ion Beam

	Atomic Force Microscopy

	Ion Scattering

	Applications
	• General Morphology • Structural Studies • Compositional Analysis • Surface Studies • Nanofabrication

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Surface Studies - Ion Beam Analysis

Rutherford Backscattered Spectra of a PZT Film

This a Rutherford backscattered spectra collected from a 4600A PZT film deposited on a Si substrate. The simulated film composition is Pb(Zr_0.52Ti_0.48)O₃. The data were collected at normal incidence with a 2.0 MeV He+ beam.

PENN Regional Nanotechnology Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718