Penn Regional Nanotechnology Facility

	General Information

	Electron Microscopy
	• JEOL 2010F FEG HRTEM/STEM • JEOL 2010 TEM • JEOL 7500F FEG HRSEM • FEI Quanta FEG ESEM

	Focused Ion Beam

	Atomic Force Microscopy

	Ion Scattering

	Applications

	Reservations

	Instrument Rates

FEI 600 Quanta FEG ESEM

Specifications

Resolution
	High Vacuum
	STEM at 30 kV: 0.8 nm
	SEI at 30 kV: 1.2 nm
	SEI at 1 kV : 3.0 nm
	BEI at 30 kV: 2.5 nm

	Low Vacuum
	SEI at 30 kV: 1.5 nm
	SEI at 3 kV: 3.0 nm
	BEI at 30 kV: 2.5 nm

	Extended Vaccum (ESEM)
	SEI at 30 kV: 1.5 nm

Electron Gun
	Schottky field emission gun
	Probe Current: up to 100 nA
	Accelerating Voltage: 0.2 to 30 kV

Detectors
	Everhardt-Thornley SED
	Solid State BSED
	STEM
	Wet STEM
	Large Angle SED(low vacuum mode)
	Gaseous SED (ESEM mode) - 500 um
	IR-CCD Chamber Camera
	PGT/Spirit Prism Thin Window 60² mm EDS

Vacuum Modes
	High Vacuum: < 6 x 10^-4 Pa
	Low Vacuum: 10 to 30 Pa
	ESEM Vacuum: 10 to 4000 Pa

Stages
	Single Stub
	Multi Stub (7)
	Peltier Stage (cooling to -20^oC)
	Heating Stage (heating to 1000^oC)
	Multiple Specimen STEM

Gas Injection
	Platinum GIS
	Gold GIS

Nanomanipulators
	Dual Kleindieke MM3A Nanomanipulators
	Micro-Droplet Delivery System

PENN Regional Nanotechnology Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718