Penn Regional Nanotechnology Facility

	General Information

	Electron Microscopy
	• JEOL 2010F FEG HRTEM/STEM • JEOL 2010 TEM • JEOL 7500F FEG HRSEM • FEI Quanta FEG ESEM

	Focused Ion Beam

	Atomic Force Microscopy

	Ion Scattering

	Applications

	Reservations

	Instrument Rates

JEOL 2010F FEG HRTEM

Specifications

Resolution:
	Point-to-point Resolution	0.23 nm
	Information pass limit	0.10 nm

Gun:
	Schottky FEG Emitter	Zr/W<100>
	Probe Current	0.8 nA/nm
	Accelerating voltage	80 - 200 kV
	Accelerating voltage stability	1.0 eV

Imaging:
	Magnification range	2,000 - 1,500,000 x
	Low magnification range	50 - 6000 x
	Camera length range	4 - 2,000 mm

Modes:	TEM	alpha 1 - 3
	EDS fine probe	0.5 - 2.4 nm
	Nanobeam diffraction	0.5 - 2.4 nm
	Convergent beam Diffraction	0.5 - 2.4 nm
	Scanning-transmission
	Scanning electron imaging
	Backscattered electron imaging

Objective Lens:
	Pole piece	analytical
	Focal length	2.3
	Spherical aberration coefficient	1.0
	Chromatic aberration coefficient	1.4
	Specimen tilt range	30^o

Specimen Holders:
	Single tilt
	Low background double tilt
	Gatan Cooling
	Gatan Heating

Gatan Image Filter:
	CCD size	1024 x 1025
	Isochromaticity	< 2 eV
	Distortion	< 3%
	Energy selecting slit width	2 - 50 eV
	Energy resolution at zero-loss	0.6 mm Aperture: 1.5 eV*
		3.0 mm Aperture: 3.0 eV*
	Energy resolution at energy loss	<1.5 x zero loss value at C edge
		<2.0 x zero loss values at 1000 eV

PGT EDS System:
	Solid angle	0.208 st
	Detector window	Prism (ultrathin)
	Detected elements	down to B
	Resolution	145 eV at Mn K-alpha

PENN Regional Nanotechnology Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718