Penn Regional Nanotechnology Facility

	General Information

	Electron Microscopy
	• JEOL 2010F FEG HRTEM/STEM • JEOL 2010 TEM • JEOL 7500F FEG HRSEM • FEI Quanta FEG ESEM • JEOL 6400 SEM

	Focused Ion Beam

	Atomic Force Microscopy

	Ion Scattering

	Applications

	Reservations

	Instrument Rates

JEOL 6400 Analytical SEM

Analytical scanning electron microscopy is routinely performed on a JEOL 6400 SEM. In addition to conventional secondary electron and back scattered electron detectors, this microscope is equipped with an Oxford energy dispersive x-ray spectrometer (EDS) and wavelength dispersive x-ray spectrometer (WDS). The EDS system provides rapid chemical composition and mapping including the analysis of light elements down to boron. The WDS system is used to resolve peak overlaps in the EDS spectra and provides excellent trace element sensitivity along with x-ray detection from light elements down to boron.

PENN Regional Nanotechnology Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718