Penn Regional Nanotechnology Facility

	General Information

	Electron Microscopy
	• JEOL 2010F FEG HRTEM/STEM • JEOL 2010 TEM • JEOL 7500F FEG HRSEM • FEI Quanta FEG ESEM

	Focused Ion Beam

	Atomic Force Microscopy

	Ion Scattering

	Applications

	Reservations

	Instrument Rates

JEOL 6400 Analytical SEM

Specifications

Resolution
	SEI 35 kV, 8 mm WD	3.5 nm

Gun
	Tungsten filament
	Probe Current	10^-12 - 10^-5 A
	Accelerating voltage	0.2 - 40 kV

Imaging
	Magnification range	10 - 300,000 x
	Modes	SEI, BEI, ECP

Specimen Stage
	Movement	x: 50 mm
		y: 70 mm
		z: 40 mm
		Tilt: -5 - 90^o
		Rotation: 360^o
	Maximum specimen size	Diam: 100 mm
		Height: ~35 mm

Oxford EDS
	Detector window	Be, ultrathin, windowless
	Elements	Down to B
	Resolution	150 eV
	Modes	EDS (Qual, Quant)
		Digital Imaging
		X-ray Mapping

Microspec WDS
	Linear Johansson design optics
	Bragg angle	range: - 33-135^o 2-th
	Analyzing crystals	LIF, PET, TAP, LOD
	Detectors	Flow Proportional
		Xe-Sealed Proportional
	Quantitative algorithms	ZAF
		Phi-Ro-Z
		Quadrilateral

PENN Regional Nanotechnology Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718