Penn Regional Nanotechnology Facility

	General Information

	Electron Microscopy
	• JEOL 2010F FEG HRTEM/STEM • JEOL 2010 TEM • JEOL 7500F FEG HRSEM • FEI Quanta FEG ESEM

	Focused Ion Beam

	Atomic Force Microscopy

	Ion Scattering

	Applications

	Reservations

	Instrument Rates

JEOL 7500F HRSEM

Specifications

Resolution

	STEM at 30 kV: 0.8 nm
	SEI at 30 kV: 0.8 nm
	SEI at 1 kV : 2.0 nm
	SEI (Gentle Beam) at 1 kV: 1.4 nm

Electron Gun
	Cold field emission gun
	Probe Current: 1 pA - 2 nA
	Accelerating Voltage: 0.1 - 30 kV

Detectors
	Everhardt-Thornley secondary electron detector - Upper/In-Lens with Energy Filter (R-Filter) design
	Everhardt-Thornley secondary electron detector - lower
	Solid state backscattered electron detector
	Transmitted electron detector
	IR-CCD Chamber Camera
	Oxford Inca Thin Window 10² mm EDS

Vacuum Mode
	High Vacuum: < 1 x 10^-4 Pa
	Dry vacuum system for clean specimen environment
	Liquid nitrogen anticontamination device

Stages
	Single Stub (0.5" and 1")
	Multi Stub (6 x 0.5")
	Single Specimen STEM

PENN Regional Nanotechnology Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718