Penn Regional Nanotechnology Facility

Penn Regional Nanotechnology Facility

Penn Engineering

	General Information

	Electron Microscopy

	Focused Ion Beam

	Atomic Force Microscopy

	Ion Scattering

	Applications

	Reservations

	Instrument Rates

FEI Strata DB235 Focused Ion Beam

Specifications

Resolution
	SEI 30 kV, 18 mm WD	7 nm
	SEI 30 kV, 7 mm WD	3 nm
	SEI 1 kV, 2 mm WD	3 nm

Gun
	Schottky field emission gun
	Probe Current	up to 20 nA
	Accelerating voltage	0.2 - 30 kV

Imaging
	Magnification range	55 - 700,000 x
	Modes	SEI,BEI, IBI

Specimen Stage
	Movement	x: 25 mm
		y: 25 mm
		z: 25 mm
		Tilt: 0 - 52^o
		Rotation: 360^o
	Maximum specimen size	Diam: 80 mm
		Height: 25 mm

Gas Injection Systems:
	Pt deposition
	Enhanced metals etch
	Delineation (selective oxide) etch
	Selective carbon etch

PENN Regional Nanotechnology Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718