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General Information |
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Electron Microscopy |
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Focused Ion Beam |
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Atomic Force Microscopy |
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Ion Scattering |
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Applications |
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Reservations |
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Instrument Rates |
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NEC Minitandem Ion Accelerator |
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| Thin film characterization is carried out in the Nanotech Facility's Ion Scattering Laboratory. At the heart of this laboratory is an NEC 5SDH 1.7MV Pelletron Accelerator, which is capable of producing ion beams ranging from 0.2-5.1 MeV. The laboratory maintains three beam lines: (1) A General Purpose Station for Rutherford Backscattering, Particle Induced X-ray Emission and Forward Recoil Spectrometry, (2) a High Resolution Surface Structure Analysis Station with in situ heating and deposition, ion sputtering, a photoemission system, RBS, AES and LEED, and (3) and a Time-of-flight Molecular Beam Epitaxy station. A computer-controlled goniometer aids in the collection of channel maps for crystal structure orientation studies and ion implantation applications. |
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / prnf@seas.upenn.edu / 215.898.8718
