Thin film characterization is
carried out in the Nanotech Facility's Ion Scattering Laboratory.
At the heart of this laboratory is an NEC 5SDH 1.7MV
Pelletron Accelerator, which is capable of producing ion beams ranging
from 0.2-5.1 MeV. The laboratory maintains three beam lines: (1)
A General Purpose Station for Rutherford Backscattering, Particle
Induced X-ray Emission and Forward Recoil Spectrometry, (2) a High
Resolution Surface Structure Analysis Station with in situ heating
and deposition, ion sputtering, a photoemission system, RBS, AES
and LEED, and (3) and a Time-of-flight Molecular Beam Epitaxy station.
A computer-controlled goniometer aids in the collection of channel
maps for crystal structure orientation studies and ion implantation
Nanoscale Characterization Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104
/ email@example.com / 215.898.8718