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Nanoscale Characterization Facility Penn Engineering
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General Information
Electron Microscopy
Focused Ion Beam
Atomic Force Microscopy
Ion Scattering
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Instrument Rates
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NCF Registration Form


NEC Minitandem Ion Accelerator
Thin film characterization is carried out in the Nanotech Facility's Ion Scattering Laboratory. At the heart of this laboratory is an NEC 5SDH 1.7MV Pelletron Accelerator, which is capable of producing ion beams ranging from 0.2-5.1 MeV. The laboratory maintains a beam line and end station for Rutherford Backscattering, Particle Induced X-ray Emission and Forward Recoil Spectrometry and ion implantation. A computer-controlled goniometer aids in the collection of channel maps for crystal structure orientation studies and ion implantation applications.


Nanoscale Characterization Facility
University of Pennsylvania / 3231 Walnut Street / Philadelphia PA 19104 / / 215.898.8718
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  Penn Engineering