Rutherford Backscattered Spectrometry (RBS)

	Thin film thickness measurement
	Quantitative compositional analysis
	Crystallographic orientation analysis via channel mapping
	Study of surface diffusion

Forward Recoil Spectrometry (FReS)

	Thin film thickness determination
	Quantitative analysis of H and D concentrations

Proton Induced X-ray Emission (PIXE)

Quantitative compositional analysis (Z >= Na)