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Ferroelectric Nanolithography

• Overview
• Photodeposition
• E-Beam Patterning
• Ferroelectric domain patterning with electron beams
• SPM Patterning
• Ferroelectric Polymers
• Complex Structures
• Atomic Polarization

Penn Engineering   | LRSM   |   © Dawn A. Bonnell / Materials Science & Engineering / University of Pennsylvania