Which books do we use?

Textbook
"Microsystem Design" by Stephen D. Senturia, Kluwer Academic Publishers, 2001.
See the website for this book maintained by the author.
This is the first book that addresses the modeling and design issues of MEMS. Its author is one of the pioneers of the MEMS field and, more importantly, one who advocated the need for modeling and design since the inception of the field. As we read and learn from this book, we can be assured that we are in good hands.

To supplement the material covered in this book, you will get handouts and reprints of seminal and contemporary papers in the field. There are plenty of books in the field now, which serve as excellent reference books for us. Here are some. The ones in blue color are available in the MEAM 550 Course Reserve in the Engineering library. Check them out (pun not intended).

Reference books

1. Micromachined Transducers Sourcebook by Gregory Kovacs, WCB McGraw-Hill, Boston, 1998, ISBN 0-07-290722-3.
   This is a very comprehensive book and touches upon alomost all application and processing aspects of MEMS until the time it was published, but has very little on modeling design aspects. As its title indicates, it is a great reference book. This book is available in the Towne library reserve.
2. Fundamentals of Microfabrication by Marc Madou, CRC Press, 1997, ISBN 0-8493-9451-1.
   This is a great reference for process related details of MEMS. It also covers a number of topics related to fabrication of MEMS devices. It has a chapter on scaling effects at micro scale and has some discussion of modeling. It is available on reserve in Towne library.
3. Micromechanical Transducers: Pressure sensors, accelrometers, and gyroscopes by M.-H. Bao, Elsevier, New York, 2000.
   This book can be considered to be a collection of detailed case-studies on pressure sensors, accelerometers, and gyroscopes. It has the necessary background on these topics. It is available on reserve in Towne library.
4. "Microsystem Technology and Microrobotics" by Sergej Fatikow and Ulrich Rembold, Springer.
   
5. "Micromechanics and MEMS: Classic and Seminal Papers to 1990. " by William Trimmer, IEEE Press, IEEE Number PC4390, ISBN 0-7803-1085-3, New York.
   A its title indicates, it has a number of early papers in the area.
6. "Microsensors" by Richard S. Muller, Roger T. Howe, Stephen D. Senturia, Rosemary L. Smith, and Richard M. White, IEEE Press, IEEE Number PC 0257-6, ISBN 0-87942-254-9, New York, 1991.
   This book is compilation of pioneering papers in the MEMS area. A very useful book for those interested when and how exactly the MEMS area took its shape.
7. Transducers and their Elements by A.D. Khazan, Prentice-Hall, ENglewood Cliffs, NJ
   This is an excellent reference book for refreshing one's knowledge of transduction principles.
8. Introduction to Microelectromechanical (MEM) Microwave Systems by H.J. De Los Santos, Artech House, Boston, 1999.
   This book is for those interested in MOEMS -- MicroOptoElectroMechanical Systems.