What do we do in this course?

In this course, we will discuss:

• What MEMS are and what they can do
• How MEMS are made (only an overview)
• Principles of operation (transduction) of MEMS
• How to model and analyze MEMS and what is new here compared to macro scale systems
• MEMS design process (as it is today)
• Computational methods used to simulate MEMS
• How to design your own MEMS device and submit for µ-fab
• Where to go next

Here are the topics that we will cover:

• Overview of MEMS: its genesis and unique features
• Overview of microfabrication (just enough so that we know how MEMS are made)
• Mask design and its importance
• Modeling strategies: lumped modeling and dynamics
• Coupled-domain simulations (elasto-static and dynamics, electrostatic, magnetic, thermal, and simple fluidic and optical)
• System-level analysis and design
• Case studies: pressure sensors, accelerometers, gyroscopes, comb-drives, micromotors, mechanisms, mechanical filters, light valves, micro pumps and valves, thermal actuators and sensors, polychromators, etc.

In addition to attending classes, reading reference books, technical journals and conference proceedings is needed for this course. Since several disciplines will be touched upon, the necessary background materials should be refreshed to get the most out of the materials covered in the class.

• There will be ten homeworks.
  
• Each student will individually do a project, which is a detailed case-study done throughout the semester. Click on "project" for more information.
  
• There will be two exams.