Think big about small things
MEAM550 Modeling and Design of MEMS (Fall 2001)
Mechanical Engineering and Applied Mechanics, University of Pennsylvania
Instructor: (Suresh) G. K. Ananthasuresh, 218 Towne Bldg., Tel: (215) 898-7191, gksuresh@seas.upenn.edu
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Homework #9

Assigned: Nov. 19, 2001
Due: Nov. 28, 2001
Points: 20

  1. Points: 10
    Describe in detail the fabrication of the device you are looking at for your case-study. It should include the description of the process, mask layouts, packaging considerations, etc. Do research to find as much information as possible.
  2. Points: 10
    Model any aspect of your device. Formulate a small problem and solve it completely. Most projects are amenable for this. If you put in sincere effort now to identify a modeling aspect, your case-study will get a great start and you will be able to finish the project on time. Good efforts will earn more credit.
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