Think big about small things!
MEAM550 Modeling and Design of MEMS
Mechanical Engineering and Applied Mechanics, University of Pennsylvania
Instructor: (Suresh) G. K. Ananthasuresh, 218 Towne Bldg., Tel: (215) 898-7191, gksuresh@seas.upenn.edu
Lectures: MW 3-4:30 in Towne 305; Office hours: F 2-4 in Towne 218
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Handouts and notes

We will sumpplement the material covered in the textbook with handouts, powerpoint presentations, pdf files, reprints of papers, etc. An effort will be made to list them all here in the chronological order.

  1. "There is plenty of room at the bottom" -- Richard Feynman. To be picked up on Sep. 10th.
  2. "Infinetesimal machinery" -- Richard Feynman. To be picked up on Sep. 10th.
  3. "A glimpse of MEMS" -- instructor's power point presentation. Distributed on Sep. 17th. Also available here as a pdf file to download.
  4. An overview of micromachining for MEMS designers Distributed on Sep. 24th.
  5. Surface micromachining of in-plane substrate hinge. Distributed on Sep. 26th.
  6. Making a micro cantilever. Distributed on Sep. 26th.
  7. Sandia's SUMMiT process flow Distributed on Sep. 26th.
  8. MatlabPrimer by Prof. Kermit Sigmon of University of Florida written in 1993 but still relevant to get started with Matlab. It is a postscript file of 322 KB.
  9. Handout of the paper "Stabilization of Electrostatically Actuated Mechanical Devices". Distributed on Oct. 22.
  10. Handout of the paper "Tunable IR Filters with Integral Electromagntic Actuators." Distributed on Oct. 22.
  11. Handout of the paper "An Approach to Macromodeling of MEMS for Nonlinear Dynamic Simulation". Distributed on Oct. 22.
  12. FEA beam theory , a chapter from MEAM 310 bulkpack on finite element analysis. It is a pdf file of 238.5 KB.
  13. Squeezed-film effects paper by Veijola et al. Distributed on Oct. 24th.
  14. Squeezed-film effects paper by Yang et al. Distributed on Oct. 24.
  15. Previous year's mid-term exam. Distributed on Oct. 31.
  16. Resonant beam pressure sensor paper. Distributed on Nov. 7th.
  17. 1947 paper on "compact electromechanical filters" by Adler. Distributed on Nov. 19th.
  18. "Communications Applications of MEMS" by Clark Nguyen. Distributed on Nov. 19th.
  19. "Micro-Electro-Mechanical Systems (MEMS) and Fluid Flows" by C. M. Ho and Y.-C. Tai. Distributed on Nov. 26th.
  20. "Powerful tools for genetic analysis come of age" by David Graves. Distributed on Nov. 28th.