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MEAM550 Modeling and Design of MEMS
Mechanical Engineering and Applied Mechanics, University of Pennsylvania
Instructor: (Suresh) G. K. Ananthasuresh, 218 Towne Bldg., Tel: (215) 898-7191, gksuresh@seas.upenn.edu
Lectures: MW 3-4:30 in Towne 305; Office hours: F 2-4 in Towne 218
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Who can take this course

MEMS is an a multi-disciplinary area. Therefore, some familiarity with the basics of several disciplines is necessary. The lack of it can be compensated by willingness and ability to learn by taking the initiative. Strong background in physics and, to some extent, in chemistry is extremely useful. An imaginative and creative mind is essential to appreciate this area.

In this course, we focus on modeling and design. This requires that you have sufficient background in differential equations, linear algebra, numerical methods, and familiarity with Matlab, Maple, or any other software that can help you write simple computer programs with a graphical interface.

And then there is the "domain-specific" knowledge. That is you need to be familiar with a number of specific details of several topics such as strength of materials, rigid and flexible body dynamics, circuit analysis and design, fluid mechanics, heat transfer, optics and microscopy, microfabrication, and the list is endless. However, for the purpose of this class, the following background is enough.
Strength of materials (MEAM 210 or equivalent requires; MEAM 454 or equivalent preferred)
Dynamics (MEAM 211 or equivalent required; MEAM 535 or equivalent preferred)
Finite element analsysis (MEAM 527 preferred but not required)
Electrical circuit analysis (EE 205/215 preferred but not required)

This is a graduate level course but is open to undergraduates who have the necessary background and motivation. Undergraduates need instructor's permission to take this course.