There is a wealth of information out there...

Conference Proceedings

1. Transducers

This conference is held in the odd years (93, 95, 97, 99, 2001, …) and is attended by MEMS researchers around the world.
2. Hilton-Head Solid-State Sensors and Actuators

This is held in even years (92, 94, 96, 98, 2000, …) in Hilton Head Island, SC. It is mostly attended by MEMS researchers in USA and is a relatively small, but well-organized conference.

3. MEMS

This is held every year and is attended by researchers around the world. This is also a small conference.

4. ASME Winter Annual Meetings

The annual ASME Winter Annual Meeting (officially called International Mechanical Engineering Congress and Exposition) has a number of symposia on MEMS related topics.

5. MSM (Microsystem Modeling and Simulation)

This is a relatively new conference held in 1998 for the first time and focuses on modeling and design of microsyatems at large.

6. SPIE Conferences

The conference held by SPIE, the International Society for Optical Engineering, has several symposia that focus on some aspects of MEMS and Smart Structures.

1. IEEE/ASME Journal of Microelectromechanical Systems (JMEMS)
   
2. Journal of Micromechanics and Microengineering
   
3. IEEE Electron Device Letters
   
4. Sensors and Actuators A (Physical)
   
5. Sensors and Actuators B (Chemical)
   
6. Sensors and Actuators C (Materials)
   

1. Massachusetts Institute of Technology taught by Prof. Steve Senturia
2. University of Washington taught by Prof. Karl Bohringer
3. University of California, Berkeley taught by Prof. Kris Pister.
4. University of Maryland taught by Prof. Reza Ghodssi
5. Columbia University taught by Prof. Vijay Modi and Prof. K. R. Farmer
6. Oregon Graduate Institue taught by Prof. Milton Scholl
7. SUNY-Buffalo taught by Prof. David Shaw
8. University of Pacific taught by Prof. Krysac.
9. Tel-Aviv University taught by Prof. Dan Haronian.

Visit MEMS Clearing house for a number of links relatted to MEMS.

Research web pages at other universities and research labs

1. University of Wisconsin-Madison
2. Stanford University
3. Berkeley Sensors and Actuator Center
4. CalTech
5. Sandia MEMS group
6. University of Twente, Netherlands
7. Columbia University
8. Tel-Aviv University, Israel

Companies that are enganged in software develoment for MEMS

1. Intellisense
2. Coventor
3. MEMSCap
4. ANSYS
5. Tanner Research
6. CFD Research

Companies that are developing and marketing MEMS devices

1. Digital Light Processor at Texas Instruments
2. Accelorometer at Analog Devices
3. Optical cross-connects at Bell Labs Innovations.
4. Some products and microfabrication services by Cronos -- JDS Uniphase.