Announcement(s): Since I need to be at a conference on Sep. 10 - 12th, we will not have class on those days.
So, our first class will be on Sep. 17th.

Schedule

Note: This schedule is a micro verison :-) So, it is subject to expansions in the future. Please check regularly.

See the schedule in 1998.

Week	Dates	Topics Reading	Assignments	What's due and when?
1	Sep. 12 and 14	No classes this week. See the announcement above. Pick up two papers from MEAM office (Towne 297). Read them to entertain yourself. These are written by Richard Feynman, a Nobel laureate in Physics!
2	Sep. 17 and 19	A glimpse of MEMS Foreword to the textbook, Chapter 1 Modeling and design of MEMS: The big picture Chapter 2	HW #1 assigned on 9/17
3	Sep. 24 and 26	Microfabrication: the essentials Chapters 3 and 4	HW #2 assigned on 9/24	HW #1 due on 9/24
4	Oct. 1 and 3	Lumped modeling of MEMS Chapter 5	HW #3 assigned on 10/3	HW #2 due on 10/1
5	Oct. 8 and 10	Electro- elasto- static modeling: physics and lumped modeling Chapter 6; paper reprints Applications: pressure sensor, comb-drive, accelerometer, micro-mirrors, light valves, etc.	HW #4 assigned on 10/10	HW #3 due on 10/10
6	Oct. 15 and 17	Electro- elasto- static modeling: computations Handout and paper reprints; Chapters 8-10	HW #5 assigned on 10/17	HW #2 due on 10/17
7	Oct. 22 and 24	Electro- elasto- dynamic modeling: Computations Paper reprints With squeezed-film damping Paper reprints and a handout Applications: polychromator, gyroscopes, mechanical filters	HW #6 assigned on 10/24	HW #5 due on 10/24
8	Oct. 29 and 31	Modeling of dissipative processes in MEMS Chapters 11 and 12 Applications:thermal actuators, gas-flow sensors		HW #6 due on 10/31
9	Nov. 5 and 7	Lumped modeling of dissipative processes Chapter 12 Applications:micro pumps and valves	HW #7 assigned on 11/5
10	Nov. 12 and 14	System level dynamic modeling Chapter 7 and paper reprints Exam 1 on Nov. 14th. Up to what is covered until week 8	HW #8 assigned on 11/12	HW #7 due on 11/12
11	Nov. 19 and 21	Modeling of RF-MEMS: mechanical switches, relays, and filters Handout and paper reprints	HW #9 assigned on 11/19	HW #8 due on 11/21
Thanksgiving
12	Nov. 26 and 28	Fluidic MEMS guest lecture by Prof. Haim Bau Paper reprints; Chapter 13 Bio MEMS guest lecture by Prof. David Graves	HW #9 due 11/28
13	Dec. 3 and 5	Modeling of electrophoresis -- a guest lecture by Prof. Howard Hu Modeling of piezoelectric actuator Sample case-study Handout and paper reprints
14	Dec. 10	Macromodeling techniques		Project report due on 12/12
Finals week	Dec. 12	Take-home exam	You can pick up the exam when you turn in your project report	Due 24 hours after you pick up the exam.