|
# |
Date |
Topics |
What is due? |
Assignments |
|
1 |
9/9 |
Introduction |
Read three papers |
|
|
2 |
9/14 |
Making of a Microchip Video -- optional |
No lecture |
|
|
3 |
9/16 |
Silicon Run II Video-- optional |
No lecture |
|
|
4 |
9/21 |
Fab and materials overview |
HW #1 due |
Read D. Bank's web page |
|
5 |
9/23 |
Fab and materials overview |
Read MCNC's web page | |
|
6 |
9/25 |
MEMCAD Overview |
Make-up class |
|
|
8 |
9/28 |
Pressure sensors |
Homework #2 assigned | |
|
9 |
9/30 |
Accelerometers |
||
|
10 |
10/2 |
MEMCAD Practice class |
Make-up class |
|
|
10 |
10/5 |
Electromechanical modeling |
||
|
11 |
10/7 |
Electromechanical modeling |
Homework #2 Due Homework #3 aasigned |
|
|
12 |
10/12 |
Microfluidics - Prof. Haim Bau |
||
|
13 |
10/14 |
Electrostatic actuators: comb-drives and motors |
Homework #3 due on 16th. | |
|
14 |
10/19 |
Sandia microengine |
HW#4 assigned. | |
|
15 |
10/21 |
Electromechanical dynamics: |
HW#4 Due on 10/23 |
|
|
16 |
10/26 |
Electromechanical dynamics: 2-D Beam Models |
||
|
17 |
10/28 |
Electromechanical Dynamics: Approaches for 3-D analysis |
||
|
18 |
11/2 |
Squeezed film damping |
||
|
19 |
11/4 |
Three-field coupled dynamic simulation |
||
|
20 |
11/9 |
Micro gyroscopes |
MUMPs masks due: 11/10 | |
|
21 |
11/11 |
Gyroscope modeling |
HW#5 assigned. | |
|
22 |
11/16 |
Mechanical Filters |
HW#5 Due 11/18 | |
|
23 |
11/18 |
In-class exam |
||
|
24 |
11/23 |
Modeling of micromechanical filters |
HW#6 Assigned 11/14 | |
|
11/25 |
Thanksgiving -- No class |
|||
|
25 |
11/30 |
Thermal MEMS |
||
|
26 |
12/2 |
Optical MEMS |
||
|
27 |
12/7 |
System level modeling |
HW#6 Due | |
|
28 |
12/9 |
Project presentations |
||
|
* |
Final exam is take-home. | pick up between 12/15 - 12/18 | need to turn in 24 hrs. |