Wolf Nanofabrication Facility (WNF)

WNF is a user facility serving the nanofabrication needs of the Penn community as well as those of external users. It is named in honor of Prof. Jack Wolf, a Penn alumnus.

The 3,300 sq ft Facility houses a 1,950 sq ft class 10,000 cleanroom. A recent renovation project provided a new makeup air unit dedicated to the lithography rooms, a new bulk nitrogen system, a new compressed dry air system, and a new chilled process water system. New process gases such as silane, ammonia, nitrous oxide, fluoroform, and the associated gas cabinets, gas panels, valve manifold boxes, and toxic gas monitoring system have also been provided under the renovation project.

The Facility houses a variety of tools that allow to users to perform a variety of fabrication steps: (1) film casting (HMDS vapor primer, spinners, hot plates, ovens, ink-jet printer); (2) lithography (e-beam writer, stepper, mask aligners); (3) vapor deposition (evaporator, AlN reactive sputterer, PECVD, ALD, parylene coater); (4) dry etching (one ICP etcher, two RIE tools, XeF2 tool); (5) thermal processing (tube furnace); (6) thin film measurement (profilometer, ellipsometer, refractometer, stress measurement); (7) device packaging (wire bonder); (8) electrical test (probe station, four-point probe station). While WNF is primarily a fabrication Facility our users have access to an extensive array of metrology tools at Penn Regional Nanotechnology Facility, which is located across the street.

You may find additional information about WNF in the navigation pane at the left or you may contact us for more details.