P7 2D&3D Profiler

Tool Managers

For operating instructions go to the nanofab wiki (PennKey required for login).

The P7 2D&3D stylus profiler can make measurements on two and three dimensional surface topography; surface flatness, surface roughness, curvature, peak-to-valley, asperity, waviness, texture, volume, sphericity, slope, bearing ratio, and distance mainly in the micron to nanometer range.  In addition, film stress can also be measured.  The specification of P7 2D&3D profiler is shown below.