HTG 3000HR

Click here to schedule training.

Please make training requests only when your need is imminent.

Be sure to include the following information with your request:

For operating instructions go to the nanofab wiki (PennKey required for login).

The 3000HR series Mask Aligner is high resolution, Contact/Proximity Aligner.  The system offers precise and repeatable sub-micron alignment and exposure for many wafer and substrate sizes.  This includes sensitive, brittle and odd shaped materials.  The precision wedge-error compensation vacuum chucks offer consistent mask to substrate planarization for accurate separation adjustment and ease of alignment.