HTG 3000HR

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The 3000HR series Mask Aligner is high resolution, Contact/Proximity Aligner.  The system offers precise and repeatable sub-micron alignment and exposure for many wafer and substrate sizes.  This includes sensitive, brittle and odd shaped materials.  The precision wedge-error compensation vacuum chucks offer consistent mask to substrate planarization for accurate separation adjustment and ease of alignment. 

 

Specifications: