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Approved Chemicals

General Guidelines

Requesting Approval for New Chemicals

Chemicals Not Allowed in QNF

Chemicals Approved for Use in QNF


Resists, Positive

Chemical Nanofab Supplied MSDS Data Sheet Notes
AZ 5214-E No MSDS    
Microposit S1805 No MSDS    
Microposit S1813 Yes MSDS    
Microposit S1818 Yes MSDS    
Microposit SC1827 No MSDS    
Megaposit SPR 220 No MSDS    
LOR A Yes MSDS   Nanofab supplies LOR 3A only
PMGI Yes MSDS    
PMMA Yes MSDS   Nanofab supplies 495 PMMA A4, A8 & 950 PMMA A4 only
ZEP 520A Yes MSDS    

Resists, Negative

Chemical Nanofab Supplied MSDS Data Sheet Notes
HSQ No MSDS HSQ  
KMPR No MSDS    
NEB-31A3 No MSDS    
NR4-8000P No MSDS    
NR7-1000PY No MSDS    
NR9-1500P No MSDS    
NR9-8000P No MSDS    
SU-8 2000 series No MSDS    
SU-8 3000 series No MSDS    

Resists, NIL

Chemical Nanofab Supplied MSDS Data Sheet Notes
NXR-1025 Yes MSDS NXR-1025  
NXR-2030 Yes MSDS NXR-2030  
NXR-3032 Yes MSDS NXR-3032  

Other Films

Chemical Nanofab Supplied MSDS Data Sheet Notes
Cyclotene No MSDS    
Dextran No MSDS    
PZT No MSDS   Consult with nanofab staff before attempting to use
Spin-on Boron No MSDS    
Spin-on Glass 500F No MSDS    
Spin-on Phosphorous No MSDS    
Sylgard 184 Base No MSDS    
Sylgard 184 Curing Agent No MSDS    
Sylgard 186 Base No MSDS    
Poly-L-Lysine No MSDS    

Adhesion Promoters

Chemical Nanofab Supplied MSDS Data Sheet Notes
AP300 No MSDS    
AP3000 No MSDS    
HMDS Yes MSDS    
MicroPrime MP-P20 No MSDS    
OmniCoat No MSDS OmniCoat  

Developers, Alkaline

Chemical Nanofab Supplied MSDS Data Sheet Notes
AZ 300 MIF No MSDS   Caution: THAH is very toxic!
AZ 400K No MSDS    
AZ 726 MIF No MSDS   Caution: THAH is very toxic!
Microposit 351 No MSDS    
Microposit CD-30 Yes MSDS    
Microposit MF 319 Yes MSDS   Caution: THAH is very toxic!
Microposit MF 321 Yes MSDS   Caution: THAH is very toxic!
Microposit MF CD-26 Yes MSDS   Caution: THAH is very toxic!
RD 2 No MSDS   Caution: THAH is very toxic!
RD 6 No MSDS   Caution: THAH is very toxic!

Developers, Solvent-Based

Chemical Nanofab Supplied MSDS Data Sheet Notes
SU-8 developer Yes MSDS    
MIBK:IPA 1:3 Yes MSDS    

Resist Removers

Chemical Nanofab Supplied MSDS Data Sheet Notes
Remover 1165 Yes MSDS    
Remover PG Yes MSDS    
Remover RR2 No MSDS    
Remover RR5 No MSDS    

Pre-Mixed Etchants

Chemical Nanofab Supplied MSDS Data Sheet Notes
BOE 6:1 Yes MSDS    
Aluminum Etchant Type A Yes MSDS    
Gold etchant Type TFA Yes MSDS    
Nichrome Etchant TFN Yes MSDS    
Titanium Etchant TFT Yes MSDS   Contains HF! Use at HF bench only.
Titanium Etchant TFTN Yes MSDS    

Pre-Mixed Solutions

Chemical Nanofab Supplied MSDS Data Sheet Notes
Nanostrip Yes MSDS Procedure A stabilized version of Piranha.
EKC 270 No MSDS Procedure Post-etch residue remover

User-Mixed Solutions

Chemical Nanofab Supplied MSDS Data Sheet Notes
Ninhydrin in ethanol No MSDS   The solution must be mixed outside of the fab.
Poly(diallyldimethylammonium chloride) No MSDS   The solution must be mixed outside of the fab.
RCA SC-1       Nanofab provides the "ingredients"
RCA SC-2       Nanofab provides the "ingredients"

Acids

Chemical Nanofab Supplied MSDS Data Sheet Notes
Hydrochloric Acid No MSDS    
Hydrofluoric Acid Yes MSDS    
Nitric Acid Yes MSDS    
Phosphoric Acid Yes MSDS    
Sulfuric Acid No MSDS    

Bases

Chemical Nanofab Supplied MSDS Data Sheet Notes
Ammonium Hydroxide Yes MSDS    
Potassium Hydroxide No MSDS    
Sodium Hydroxide No MSDS    
Tetrabuthylammonium Fluoride No MSDS    

Oxidizers

Chemical Nanofab Supplied MSDS Data Sheet Notes
Hydrogen Peroxide Yes MSDS    

Solvents

Chemical Nanofab Supplied MSDS Data Sheet Notes
Acetone Yes MSDS    
Anisole Yes MSDS    
Dimethyl Sulfoxide Yes MSDS    
Ethanol No MSDS    
Isopropanol Yes MSDS    
Methanol Yes MSDS    
NMP No MSDS    
o-Xylene Yes MSDS    

ALD Precursors

Chemical Nanofab Supplied MSDS Data Sheet Notes
Tetrakis(dimethylamino)hafnium Yes MSDS    
Tetrakis(dimethylamino)titanium Yes MSDS    
Triethoxysilane Yes MSDS    
Trimethyl Aluminum Yes MSDS    

Other

Chemical Nanofab Supplied MSDS Data Sheet Notes
Triton X-100 surfactant No MSDS    
Xenon Difluoride Yes MSDS