Kyle Keenan (kckeenan[at]seas[dot]upenn[dot]edu)
For operating instructions, go to the nanofab wiki (PennKey required for login).
Although training assistance is available upon request, users will be allowed to self-train using the operating instructions.
The Filmetrics F50 is a wafer mapping tool used to measure a wide variety of thin film types. Commonly measured films include oxides, nitrides, photoresists, and polysilicon.
Wafer Size Range: 50-450mm (2-18 inches) in diameter
Thickness Measurement Range: 20nm-100µm (film stack dependent)
Wavelength Range: 380-1050nm
Map Pattern Types: polar, rectangular, or linear, or custom