Filmetrics F50

Tool manager:

 

For operating instructions, go to the nanofab wiki (PennKey required for login).

Although training assistance is available upon request, users will be allowed to self-train using the operating instructions. 

The Filmetrics F50 is a wafer mapping tool used to measure a wide variety of thin film types. Commonly measured films include oxides, nitrides, photoresists, and polysilicon.