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Process Gases

General Guidelines

Process Gases Available in WNF


80Plus

Gas MSDS Notes
Fluoroform (CHF3) MSDS  
Tetrafluoro Methane (CF4) MSDS  
Sulfur Hexafluoride (SF6) MSDS  
Oxygen (O2) MSDS  
Argon (Ar) MSDS  

Technics

Gas MSDS Notes
Sulfur Hexafluoride (SF6) MSDS  
Oxygen (O2) MSDS  

Trion

Gas MSDS Notes
Chlorine (Cl2) MSDS  
Boron Trichloride (BCl3) MSDS  
Tetrafluoro Methane (CF4) MSDS  
Oxygen (O2) MSDS  
Nitrogen (N2) MSDS  
Argon (Ar) MSDS  

ALD

Gas MSDS Notes
Nitrogen (N2) MSDS  

PECVD

Gas MSDS Notes
Silane (10%SiH4/He) MSDS  
Ammonia (NH3) MSDS  
Nitrous Oxide (N2O) MSDS  
Tetrafluoro Methane (CF4) MSDS  
Nitrogen (N2) MSDS  
Argon (Ar) MSDS  

YES

Gas MSDS Notes
Oxygen (O2) MSDS  
Nitrogen (N2) MSDS  
Liquid Nitrogen (LN2) MSDS  

AlN

Gas MSDS Notes
Argon(Ar) MSDS  
Nitrogen (N2) MSDS  

Explorer14

Gas MSDS Notes
Nitrogen (N2) MSDS  
Oxygen (O2) MSDS