VAS Ellipsometer

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The Variable Angle Spectroscopic Ellipsometer (VASE) is the most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, and more.  It combines high accuracy and precision with a wide spectral range up to 240 to 1100nm. The VASE can not only make measurements on thickness and optical constant, but also allow the following flexible measurement capabilities owing to variable wavelength and angle of incidence:

• Reflection and Transmission Ellipsometry
• Generalized Ellipsometry
• Reflectance (R) intensity
• Transmittance (T) intensity
• Cross-polarized R/T
• Depolarization
• Scatterometry
• Mueller-matrix