WNF Chemicals

Last updated: 11/23/2009

General Guidelines

• Read the chemical's MSDS before using it.
• Always wear the required personal protective equipment when working with chemicals.
• Please treat chemicals with respect.
• Handle chemicals with care.
• Solutions containing Hydrofluoric Acid or Hydrogen Peroxide (Piranha, Nanostrip) are extremely dangerous.
• If the chemical you wish to use is not listed below please contact the Facility staff.

Chemicals No Longer Allowed in WNF

• Piranha

Chemicals Approved for Use in WNF

Resists, positive

• AZ 5214-E (MSDS)
• Microposit S1813 (MSDS)
• Microposit S1818 (MSDS)
• Microposit SC1827 (MSDS)
• Megaposit SPR 220-7.0 (MSDS)
• LOR (MSDS)
• PMGI (MSDS)
• PMMA (MSDS)
• ZEP 520A (MSDS)

Resists, negative

• NR4-8000P(MSDS)
• NR7-1000PY(MSDS)
• NR9-1500P(MSDS)
• NR9-8000P(MSDS)
• SU-8 2000 series (MSDS)
• KMPR (MSDS)

Other films

• Cyclotene (MSDS)
• Dextran (MSDS)
• PDMS
• PZT (MSDS)
• Spin-on Boron (MSDS)
• Spin-on Glass (MSDS)
• Spin-on Phosphorous (MSDS)
• Sylgard 184 (Base, Curing Agent)
• Sylgard 186 (Base)

Adhesion Promoters

• AP300 (MSDS)
• HMDS (MSDS)
• MicroPrime MP-P20
• Omnicoat (Data Sheet, MSDS)

Developers, alkaline

• AZ 300 MIF (MSDS)
• AZ 400K (MSDS)
• AZ 726 MIF (MSDS)
• Microposit 351 (MSDS)
• Microposit CD-30 (MSDS)
• Microposit MF 319 (MSDS)
• Microposit MF CD-26 (MSDS)
• RD 2 (MSDS)
• RD 6 (MSDS)

Developers, solvent-based

• SU-8 developer
• MIBK:IPA (MSDS)
• o-Xylene (MSDS)

Resist removers

• Remover 1165 (MSDS)
• Remover PG (MSDS)
• Remover RR2 (MSDS)
• Remover RR5 (MSDS)

Pre-mixed etchants

• BOE 6:1 (MSDS)
• Aluminum Etchant Type A (MSDS)
• Au etchant Type TFA (MSDS)
• Nichrome Etchant TFN (MSDS)

Pre-mixed cleaning solutions

• Nanostrip (Procedure, MSDS), a stabilized version of Piranha

User mixed solutions

• RCA1

Acids

• Hydrochloric acid (MSDS)
• Hydrofluoric acid (MSDS)
• Nitric acid (MSDS)
• Phosphoric acid (MSDS)
• Sulfuric acid (MSDS)

Bases

• Ammonium hydroxide (MSDS)
• Potassium hydroxide (MSDS)
• Sodium hydroxide (MSDS)
• Tetrabuthylammonium fluoride (MSDS)

Oxidizers

• Hydrogen peroxide, 30% (MSDS)

Solvents

• Acetone (MSDS)
• Anisole (MSDS)
• Dimethyl Sulfoxide (MSDS)
• Isopropanol (MSDS)
• Methanol (MSDS)
• NMP (MSDS)

ALD Precursors

• Titanium Isopropoxide (MSDS)
• Triethoxysilane (MSDS)
• Trimethyl Aluminum (MSDS)