| Tool Nickname | Tool Type | Manufacturer | Model |
|---|---|---|---|
| YES | Vapor primer | YES | YES-1224P |
| CEE | Spinner | Brewer Science | CEE100 |
| Laurell | Spinner | Laurell Technologies | WS-650S-6NPP-Lite |
| Headway | Spinner | Headway | |
| Dimatix | Inkjet printer | Fujifilm Dimatix | DMP-2831 |
| Tool Nickname | Tool Type | Manufacturer | Model |
|---|---|---|---|
| Elionix | e-beam | Elionix | ELS-7500EX |
| Stepper | Stepper | Nikon | G4 |
| MA4 | Mask aligner | Karl Suss | MA4 |
| Quintel | Mask aligner | Quintel | |
| Kasper | Mask aligner | Kasper |
| Tool Nickname | Tool Type | Manufacturer | Model |
|---|---|---|---|
| Evaporator | e-ebeam evaporator | home made, 3 kW Thermionics e-gun | |
| Sputterer | RF sputterer | MRC | 8667 |
| Parylene | Parylene coater | Specialty Coating Systems | PDS2010 |
| ALD | ALD | Cambridge Nanotech | Savannah 200 |
| PECVD | PECVD | Oxford Instruments | PlasmaLab 100 |
| Tool Nickname | Tool Type | Manufacturer | Model | 80+ | RIE | Oxford Instruments | PlasmaLab 80+ |
|---|---|---|---|
| Trion | ICP | Trion | Phantom III |
| Technics | RIE | Technics | Planar Etch II |
| PlasmaLab | RIE | Oxford Instruments | Plasmalab uP |
| XeF2 | XeF2 etcher | Xactix | Xetch e1 |
| Tool Nickname | Tool Type | Manufacturer | Model |
|---|---|---|---|
| Apha Step | Profilometer | Tencor | Alpha Step 200 |
| Nanospec | Refractometer | Nanometrics | Nanospec/AFT |
| Ellipsometer | Ellipsometer | Rudolph Research | AutoEL IV |
| Flexus | Stress measurement | Tencor | FCX-2320 |
| Tool Nickname | Tool Type | Manufacturer | Model |
|---|---|---|---|
| Tube furnace | Tube furnace | Thermco | 371BRAM |
| Tool Nickname | Tool Type | Manufacturer | Model |
|---|---|---|---|
| Dicing saw | Dicing saw | TBD | TBD |
| Wire bonder | Wire bonder | KNS | 4253 |
| Tool Nickname | Tool Type | Manufacturer | Model |
|---|---|---|---|
| Probe station | Probe station | Micromanipulator Co | 6000 |
| Four-point probe | Four-point probe |