Penn Nanofab Equipment

Last modified: 11/09/2009 16:05

Film Casting

Nickname Type Manufacturer Model Status Notes
YES Vapor primer YES YES-1224P up new tool manager
CEE Spinner Brewer Science CEE100 up  
Headway Spinner Headway   up  
Dimatix Inkjet printer Fujifilm Dimatix DMP-2831 up Located in Prof. Murray's lab

Lithography
Nickname Type Manufacturer Model Status Notes
Elionix e-beam Elionix ELS-7500EX up  
Stepper Stepper Nikon G4 up  
MA4 Mask aligner Karl Suss MA4 up  

Vapor Deposition
Nickname Type Manufacturer Model Status Notes
Evaporator e-ebeam evaporator home made, 3 kW Thermionics e-gun   up  
Parylene Parylene coater Specialty Coating Systems PDS2010 up Located in Prof. Kagan's lab
ALD ALD Cambridge Nanotech Savannah 200 up  
PECVD PECVD Oxford Instruments PlasmaLab 100 down being installed
AlN AlN reactive sputterer Tegal AMS 2004 SMT up  

Etchers
Nickname Type Manufacturer Model Status Notes
80+ RIE Oxford Instruments PlasmaLab 80+ down being installed
Trion ICP Trion Phantom III up  
Technics RIE Technics Planar Etch II up  
XeF2 XeF2 etcher Xactix Xetch e1 up  

Thin Film Measurement
Nickname Type Manufacturer Model Status Notes
Apha Step Profilometer Tencor Alpha Step 200 up  
Nanospec Refractometer Nanometrics Nanospec/AFT up  
Ellipsometer Ellipsometer Rudolph Research AutoEL IV up  
Flexus Stress measurement Tencor FCX-2320 up  

Packaging
Nickname Type Manufacturer Model Status Notes
Wire bonder Wire bonder KNS 4253 up Located in Prof. Piazza's lab

Electrical Characterization
Nickname Type Manufacturer Model Status Notes
Probe station Probe station Micromanipulator Co 6000 up Located in Prof. Piazza's lab
Four-point probe Four-point probe     up  

Other
Nickname Type Manufacturer Model Status Notes
SRD Spin-rinse-dryer Verteq Superclean 1600-3 up