| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| CEE | Spinner | Brewer Science | CEE100/CEE200X | $0/hr | up | CEE | |
| Dimatix | Inkjet printer | Fujifilm Dimatix | DMP-2831 | $20/hr | up | Dimatix | |
| Headway | Spinner | Headway | $0/hr | up | Headway | ||
| HotPlate01 | Hot plate | Torrey Pines Sci | HP30A | $0/hr | up | HotPlate01 | |
| HotPlate02 | Hot plate | Torrey Pines Sci | HP30A | $0/hr | up | HotPlate02 | |
| HotPlate03 | Hot plate | Torrey Pines Sci | HP30A | $0/hr | up | HotPlate03 | |
| Laurell | Spinner | Laurell | $0/hr | up | Laurell |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| Elionix | e-beam | Elionix | ELS-7500EX | $40/hr | up | Elionix | |
| MA4 | Mask aligner | Karl Suss | MA4 | $30/hr | up | MA4 | |
| NX2600 | Nanoimprinter/Mask aligner | Nanonex | NX-2600 | $40/hr | up | NX2600 | |
| Stepper | Stepper | Nikon | G4 | $30/hr | up | Stepper |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| ALD | ALD | Cambridge Nanotech | Savannah 200 | $30/hr | up | ALD | |
| AlN | AlN reactive sputterer | Tegal | AMS 2004 SMT | $30/hr | up | AlN | |
| Explorer14 | Sputterer | Denton Vacuum | Explorer 14 | $30/hr | up | Explorer14 | |
| Parylene | Parylene coater | Specialty Coating Systems | PDS2010 | $20/hr | up | Parylene | |
| PECVD | PECVD | Oxford Instruments | PlasmaLab 100 | $30/hr | up | PECVD | |
| PVD75 | e-beam/thermal evaporator | Kurt Lesker | PVD75 | $30/hr | down | PVD75 | |
| Thermionics | e-beam evaporator | 3 kW Thermionics e-gun | $30/hr | up | Thermionics | ||
| YES | Vapor primer | YES | YES-1224P | $20/hr | up | YES |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| 80Plus | RIE | Oxford Instruments | PlasmaLab 80+ | $30/hr | up | 80Plus | |
| Technics | Plasma etcher | Technics | Planar Etch II | $20/hr | up | Technics | |
| Trion | ICP | Trion | Phantom III | $30/hr | up | Trion | |
| XeF2 | XeF2 etcher | Xactix | Xetch e1 | $20/hr | up | XeF2 |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| Alpha Step | Profilometer | Tencor | Alpha Step 200 | $20/hr | up | Alpha Step | |
| Ellipsometer | Ellipsometer | Rudolph Research | AutoEL IV-NIR3 | $20/hr | up | Ellipsometer | |
| Flexus | Stress measurement | Tencor | FCX-2320 | $20/hr | up | Flexus | |
| Nanospec | Refractometer | Nanometrics | Nanospec/AFT | $20/hr | down | Nanospec | Computer problems |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| Wire Bonder | Wire bonder | KNS | 4523 | $10/hr | up | Wire Bonder |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| Probe station | Probe station | Micromanipulator Co | 6000 | $0/hr | up | Probe station | |
| Four-point probe | Four-point probe station | $0/hr | up | Four-point probe |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| HF | Chemical | $0/hr | up | HF | |||
| Nanostrip | Chemical | $0/hr | up | Nanostrip |
| Nickname | Type | Manufacturer | Model | Fee | Status | Reserve | Notes |
|---|---|---|---|---|---|---|---|
| Oven | Oven | Fisher | 13-247-625G | $0/hr | up | Oven | |
| Sonicator | Sonicator | Branson | 5510 | $0/hr | up | Sonicator | |
| SRD | Spin-rinse-dryer | Verteq | Superclean 1600-3 | $0/hr | up | SRD | With staff assistance only: M-F, 9-7 |