Penn Nanofab Equipment

Last modified: 04/19/2013 18:07

Film Casting

Nickname Type Manufacturer Model Fee Status Reserve Notes
CEE Spinner Brewer Science CEE100/CEE200X $0/hr up CEE  
Dimatix Inkjet printer Fujifilm Dimatix DMP-2831 $20/hr up Dimatix  
Headway Spinner Headway   $0/hr up Headway  
HotPlate01 Hot plate Torrey Pines Sci HP30A $0/hr up HotPlate01  
HotPlate02 Hot plate Torrey Pines Sci HP30A $0/hr up HotPlate02  
HotPlate03 Hot plate Torrey Pines Sci HP30A $0/hr up HotPlate03  
Laurell Spinner Laurell   $0/hr up Laurell  

Lithography

Nickname Type Manufacturer Model Fee Status Reserve Notes
Elionix e-beam Elionix ELS-7500EX $40/hr up Elionix  
MA4 Mask aligner Karl Suss MA4 $30/hr up MA4  
NX2600 Nanoimprinter/Mask aligner Nanonex NX-2600 $40/hr up NX2600  

Vapor Deposition

Nickname Type Manufacturer Model Fee Status Reserve Notes
ALD ALD Cambridge Nanotech Savannah 200 $30/hr up ALD  
Explorer14 Sputterer Denton Vacuum Explorer 14 $30/hr up Explorer14  
Parylene Parylene coater Specialty Coating Systems PDS2010 $20/hr up Parylene  
PECVD PECVD Oxford Instruments PlasmaLab 100 $30/hr up PECVD  
PVD75 e-beam/thermal evaporator Kurt Lesker PVD75 $25/hr up PVD75 users must supply evaporation materials and liners/boats
Thermionics e-beam evaporator 3 kW Thermionics e-gun   $25/hr up Thermionics users must supply evaporation materials and liners
YES Vapor primer YES YES-1224P $20/hr up YES  

Etchers

Nickname Type Manufacturer Model Fee Status Reserve Notes
80Plus RIE Oxford Instruments PlasmaLab 80+ $30/hr up 80Plus  
Technics Plasma etcher Technics Planar Etch II $20/hr up Technics  
Trion ICP Trion Phantom III $30/hr up Trion  
XeF2 XeF2 etcher Xactix Xetch e1 $20/hr up XeF2  

Thin Film Measurement

Nickname Type Manufacturer Model Fee Status Reserve Notes
Ellipsometer Ellipsometer Rudolph Research AutoEL IV-NIR3 $20/hr up Ellipsometer  

Packaging

Nickname Type Manufacturer Model Fee Status Reserve Notes
Wire Bonder Wire bonder KNS 4523 $10/hr up Wire Bonder  
Wafer Bond Aligner Wafer bond aligner EVG 620 $30/hr up Wafer Bond Aligner  
Wafer Bonder Wafer bonder EVG 510 $30/hr up Wafer Bonder  

Electrical Characterization

Nickname Type Manufacturer Model Fee Status Reserve Notes
Probe station Probe station Micromanipulator Co 6000 $0/hr up Probe station  
Four-point probe Four-point probe station     $0/hr up Four-point probe  

Wet Processing

Nickname Type Manufacturer Model Fee Status Reserve Notes
HF Chemical     $0/hr up HF Only 9-5, Monday through Friday
Nanostrip Chemical     $0/hr up Nanostrip  

Other

Nickname Type Manufacturer Model Fee Status Reserve Notes
Oven Oven Fisher 13-247-625G $0/hr up Oven  
Sonicator Sonicator Branson 5510 $0/hr up Sonicator  
SRD Spin-rinse-dryer Verteq Superclean 1600-3 $0/hr up SRD With staff assistance only: M-F, 9-7