Penn Nanofab Equipment

Last modified: 03/14/2012 10:25

Film Casting

Nickname Type Manufacturer Model Fee Status Reserve Notes
CEE Spinner Brewer Science CEE100/CEE200X $0/hr up CEE  
Dimatix Inkjet printer Fujifilm Dimatix DMP-2831 $20/hr up Dimatix  
Headway Spinner Headway   $0/hr up Headway  
HotPlate01 Hot plate Torrey Pines Sci HP30A $0/hr up HotPlate01  
HotPlate02 Hot plate Torrey Pines Sci HP30A $0/hr up HotPlate02  
HotPlate03 Hot plate Torrey Pines Sci HP30A $0/hr up HotPlate03  
Laurell Spinner Laurell   $0/hr up Laurell  

Lithography

Nickname Type Manufacturer Model Fee Status Reserve Notes
Elionix e-beam Elionix ELS-7500EX $40/hr up Elionix  
MA4 Mask aligner Karl Suss MA4 $30/hr up MA4  
NX2600 Nanoimprinter/Mask aligner Nanonex NX-2600 $40/hr up NX2600  
Stepper Stepper Nikon G4 $30/hr up Stepper  

Vapor Deposition

Nickname Type Manufacturer Model Fee Status Reserve Notes
ALD ALD Cambridge Nanotech Savannah 200 $30/hr up ALD  
AlN AlN reactive sputterer Tegal AMS 2004 SMT $30/hr up AlN  
Explorer14 Sputterer Denton Vacuum Explorer 14 $30/hr up Explorer14  
Parylene Parylene coater Specialty Coating Systems PDS2010 $20/hr up Parylene  
PECVD PECVD Oxford Instruments PlasmaLab 100 $30/hr up PECVD  
PVD75 e-beam/thermal evaporator Kurt Lesker PVD75 $30/hr down PVD75  
Thermionics e-beam evaporator 3 kW Thermionics e-gun   $30/hr up Thermionics  
YES Vapor primer YES YES-1224P $20/hr up YES  

Etchers

Nickname Type Manufacturer Model Fee Status Reserve Notes
80Plus RIE Oxford Instruments PlasmaLab 80+ $30/hr up 80Plus  
Technics Plasma etcher Technics Planar Etch II $20/hr up Technics  
Trion ICP Trion Phantom III $30/hr up Trion  
XeF2 XeF2 etcher Xactix Xetch e1 $20/hr up XeF2  

Thin Film Measurement

Nickname Type Manufacturer Model Fee Status Reserve Notes
Alpha Step Profilometer Tencor Alpha Step 200 $20/hr up Alpha Step  
Ellipsometer Ellipsometer Rudolph Research AutoEL IV-NIR3 $20/hr up Ellipsometer  
Flexus Stress measurement Tencor FCX-2320 $20/hr up Flexus  
Nanospec Refractometer Nanometrics Nanospec/AFT $20/hr down Nanospec Computer problems

Packaging

Nickname Type Manufacturer Model Fee Status Reserve Notes
Wire Bonder Wire bonder KNS 4523 $10/hr up Wire Bonder  

Electrical Characterization

Nickname Type Manufacturer Model Fee Status Reserve Notes
Probe station Probe station Micromanipulator Co 6000 $0/hr up Probe station  
Four-point probe Four-point probe station     $0/hr up Four-point probe  

Wet Processing

Nickname Type Manufacturer Model Fee Status Reserve Notes
HF Chemical     $0/hr up HF  
Nanostrip Chemical     $0/hr up Nanostrip  

Other

Nickname Type Manufacturer Model Fee Status Reserve Notes
Oven Oven Fisher 13-247-625G $0/hr up Oven  
Sonicator Sonicator Branson 5510 $0/hr up Sonicator  
SRD Spin-rinse-dryer Verteq Superclean 1600-3 $0/hr up SRD With staff assistance only: M-F, 9-7