Penn Nanofab Equipment

Last modified: 7/15/2014 08:55

Film Casting

Nickname Type Manufacturer Model Fee Status Reserve Notes
CEE Spinner Brewer Science CEE100/CEE200X $0/hr up CEE  
Dimatix Inkjet printer Fujifilm Dimatix DMP-2831 $20/hr up Dimatix Now located in the Singh Center for Nanotechnology, Rm 104.
Headway Spinner Headway   $0/hr up Headway  
Laurell Spinner Laurell   $0/hr up Laurell  

Lithography

Nickname Type Manufacturer Model Fee Status Reserve Notes
Elionix e-beam Elionix ELS-7500EX $40/hr up Elionix  
Beamer Elionix optimization software GenISys   $0/hr up Beamer  
MA6/BA6 Mask aligner Suss MicroTech MA6/BA6 $30/hr up MA6/BA6
NX2600 Nanoimprinter/Mask aligner Nanonex NX-2600 $40/hr up NX2600  
3000HR Mask aligner ABM 3000HR $30/hr up 3000HR  

Vapor Deposition

Nickname Type Manufacturer Model Fee Status Reserve Notes
ALD ALD Cambridge Nanotech Savannah 200 $30/hr up ALD
Explorer14 Sputterer Denton Vacuum Explorer 14 $30/hr up Explorer14  
Parylene Parylene coater Specialty Coating Systems PDS2010 $20/hr up Parylene  
PECVD PECVD Oxford Instruments PlasmaLab 100 $30/hr up PECVD
PVD75 e-beam/thermal evaporator Kurt Lesker PVD75 $25/hr up PVD75 users must supply evaporation materials and liners/boats
YES Vapor primer YES YES-1224P $20/hr up YES  

Etchers

Nickname Type Manufacturer Model Fee Status Reserve Notes
80Plus RIE Oxford Instruments PlasmaLab 80+ $30/hr up 80Plus
Technics Plasma etcher Technics Planar Etch II $20/hr up Technics  
Trion ICP Trion Phantom III $30/hr up Trion
XeF2 XeF2 etcher Xactix Xetch e1 $20/hr up XeF2

Thin Film Measurement

Nickname Type Manufacturer Model Fee Status Reserve Notes
Ellipsometer Ellipsometer Rudolph Research AutoEL IV-NIR3 $20/hr up Ellipsometer  
VAS Ellipsometer Variable Angle Spectroscopic Ellipsometer J. A. Woollam V-VASE $0/hr up VAS Ellipsometer  
P7 2D Profiler Stylus Profiler KLA Tencor P7 $0/hr up P7 2D Profiler  
P7 2D&3D Profiler Stylus Profiler KLA Tencor P7 $0/hr up P7 2D&3D Profiler  
Zygo 3D Profiler Optical Profiler Zygo New View 7300 $0/hr up Zygo 3D Profiler  
Filmetrics F40 Spectral Reflectance Thickness Monitor Filmetrics F40 $0/hr up Filmetrics F40  
Filmetrics F50 Spectral Reflectance Automated Film Thickness Mapper Filmetrics F50 $0/hr up Filmetrics F50  

Packaging

Nickname Type Manufacturer Model Fee Status Reserve Notes
Wire Bonder Wire bonder KNS 4523 $10/hr up Wire Bonder Now located in the Singh Center for Nanotechnology, Rm 104.
Wafer Bond Aligner Wafer bond aligner EVG 620 $30/hr up Wafer Bond Aligner
Wafer Bonder Wafer bonder EVG 510 $30/hr down Wafer Bonder "cool-chuck" not functioning.

Electrical Characterization

Nickname Type Manufacturer Model Fee Status Reserve Notes
Probe station Probe station Micromanipulator Co 6000 $0/hr up Probe station Now located in the Singh Center for Nanotechnology, Rm 104.
Four-point probe Four-point probe station     $0/hr up Four-point probe Now located in the Singh Center for Nanotechnology, Rm 104.

Other

Nickname Type Manufacturer Model Fee Status Reserve Notes
Oven Oven Fisher 13-247-625G $0/hr up Oven  
SRD Spin-rinse-dryer Verteq Superclean 1600-3 $0/hr up SRD