Reservation System Policies

Last updated: August 27, 2013

1. Notes

2. Definitions

3. Basic Policies

4. Time Horizon Policies

5. Frequency Policies

  1. Prime Time
  2. Non-Prime Time

6. Duration Policies

Film Casting

Tool Nickname Tool Type Reservation Length Max Days in Advance
CEE Spinner
1 hour
4
Dimatix Inkjet printer
2 hours
4
Headway Spinner
1 hour
4
Laurell Spinner
1 hour
4

Lithography

Tool Nickname Tool Type Reservation Length Max Days in Advance
Elionix e-beam
4 hours
2
MA4 Mask aligner
2 hours
4
NX2600 Nanoimprinter/Mask aligner
2 hours
4
Stepper Stepper
2 hours
4

Vapor Deposition

Tool Nickname Tool Type Reservation Length Max Days in Advance
ALD ALD
3 hours
4
AlN AlN reactive sputterer
3 hours
4
Explorer14 Sputterer
3 hours
4
Parylene Parylene coater
4 hours
4
PECVD PECVD
3 hours
4
PVD75 e-ebeam/thermal evaporator
3 hours
4
Thermionics e-ebeam evaporator
3 hours
4
YES Vapor primer
2 hours
4

Dry Etching

Tool Nickname Tool Type Reservation Length Max Days in Advance
80Plus RIE
2 hours
4
Technics Plasma etcher
2 hours
4
Trion ICP
2 hours
4
XeF2 XeF2 etcher
2 hours
4

Film Measurement

Tool Nickname Tool Type Reservation Length Max Days in Advance
Alpha Step Profilometer
1 hour
4
Ellipsometer Ellipsometer
1 hour
4

Packaging

Tool Nickname Tool Type Reservation Length Max Days in Advance
Wire Bonder Wire bonder
1 hour
4

Electrical Characterization

Tool Nickname Tool Type Reservation Length Max Days in Advance
Probe station Probe station
1 hour
4
Four-point probe station Four-point probe
1 hour
4

Wet Processing

Tool Nickname Tool Type Reservation Length Max Days in Advance
HF Chemical
3 hours
4
Nanostrip Chemical
3 hours
4

Other

Tool Nickname Tool Type Reservation Length Max Days in Advance
Oven Oven
3 hours
4
Sonicator Sonicator
1 hour
4
SRD Spin-rinse-dryer
1 hour
4