| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| CEE | Spinner | ||
| Dimatix | Inkjet printer | ||
| Headway | Spinner | ||
| Laurell | Spinner |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| Elionix | e-beam | ||
| MA4 | Mask aligner | ||
| NX2600 | Nanoimprinter/Mask aligner | ||
| Stepper | Stepper |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| ALD | ALD | ||
| AlN | AlN reactive sputterer | ||
| Explorer14 | Sputterer | ||
| Parylene | Parylene coater | ||
| PECVD | PECVD | ||
| PVD75 | e-ebeam/thermal evaporator | ||
| Thermionics | e-ebeam evaporator | ||
| YES | Vapor primer |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| 80Plus | RIE | ||
| Technics | Plasma etcher | ||
| Trion | ICP | ||
| XeF2 | XeF2 etcher |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| Alpha Step | Profilometer | ||
| Ellipsometer | Ellipsometer |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| Wire Bonder | Wire bonder |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| Probe station | Probe station | ||
| Four-point probe station | Four-point probe |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| HF | Chemical | ||
| Nanostrip | Chemical |
| Tool Nickname | Tool Type | Reservation Length | Max Days in Advance |
|---|---|---|---|
| Oven | Oven | ||
| Sonicator | Sonicator | ||
| SRD | Spin-rinse-dryer |