WNF Equipment Status

Last modified: 11/18/2008 14:41

Resist Coating
Tool Nickname Tool Status Notes To be up by (est)
YES up    
CEE up only large chuck available  
Laurell up    
Headway up    

Lithography
Tool Nickname Tool Status Notes To be up by (est)
Elionix up    
Stepper up    
MA4 up    
Quintel up    
Kasper up    

Deposition
Tool Nickname Tool Status Notes To be up by (est)
Evaporator up New deposition monitor installed. Need help to determine the tooling factor; please measure the thickness of your films  
Sputterer down Cryo scheduled tp arrive on 11/20/2008 TBD
Parylene up    
ALD not installed In storage TBD
PECVD not installed In storage TBD

Etchers
Tool Nickname Tool Status Notes To be up by (est)
80+ not installed In storage. TBD
Trion up    
Technics up    
PlasmaLab down Troubleshooting vacuum leak; broken ion gauge  
XeF2 up    

Thermal Processing
Tool Nickname Tool Status Notes To be up by (est)
Tube furnace up Two tubes in use  

Thin Film Measurement
Tool Nickname Tool Status Notes To be up by (est)
Alpha Step up    
Nanospec up    
Ellipsometer up    
Flexus up    

Packaging
Tool Nickname Tool Status Notes To be up by (est)
Wire bonder up    

Electrical Characterization
Tool Nickname Tool Status Notes To be up by (est)
Probe station up    
Four-point probe up