ALD - Cambridge Nanotech Savannah 200
Tool managers
:
John Qi (zjq[at]sas[dot]upenn[dot]edu)
Lauren Willis (willisl[at]sas[dot]upenn[dot]edu)
Marjan Saboktakin (marjans[at]seas[dot]upenn[dot]edu)
The following materials can be deposited:
Al2O3
SiO2
TiO2
Tool managers: