Alpha Step AS200
Tool managers:
- Chi-Mon Chen (chiche[at]seas[dot]upenn[dot]edu)
- Kyle Keenan (kckeenan[at]seas[dot]upenn[dot]edu)
The Alpha Step is a stylus profilometer.
Capabilities
- Maximum scan length: 10 mm
- Maximum height step: ± 160 um
- Resolution:
- Horizontal: 40 nm
- Vertical (± 16 um range): 0.5 nm
- Vertical (± 160 um range): 5 nm