Ellipsometer
Tool managers:
- Joe Grogan (jgrogan[at]seas[dot]upenn[dot]edu)
- Hiromichi Yamamoto (hyam[at]seas[dot]upenn[dot]edu)
- Kyle Keenan (kckeenan[at]seas[dot]upenn[dot]edu)
The ellipsometer can be used to measure the thickness and optical constants of thin films.