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For operating instructions go to the nanofab wiki (PennKey required for login).

The AutoEL IV-NIR3 ellipsometer can be used to measure the thickness and optical constants (refractive index) of thin films.
The following wavelengths are available: 405, 632.8, and 830 nm.

The limits of thickness and refractive index measurements are also shown in Ellipsometer Recipes in nanofab wiki (PennKey required for login).