Tool manager: Yuming Lai (yumingl[at]seas[dot]upenn[dot]edu)
The PDS 2010 is a vacuum system used for the vapor deposition of the Parylene polymer (-(CH2-C6H4-CH2)n-) onto a variety of
substrates. The clear polymer coating formed provides an extremely effective chemical and moisture barrier
with high dielectric and mechanical strength.
The PDS 2010 transforms Parylene dimer to a gaseous monomer; upon deposition the material polymerizes, at room temperature, onto the substrate. There is no intermediate liquid phase or separate cure cycle. At the vacuum levels employed, all sides of the substrate are uniformly impinged by the gaseous monomer, resulting in a truly conformal coating.
For operating instructions go to the nanofab wiki (PennKey required for login).