Nikon G4 Stepper

Tool managers:

For operating instructions go to the nanofab wiki (PennKey required for login).

The stepper can achieve the following:

  1. Minimum feature of 700 nm
  2. 50 nm overlay
  3. 28 dies (15 mm square) can be placed on a 4” wafer

To use this specific stepper, the following requirements need to be met:

  1. 4-inch wafers ONLY
  2. Wafer thickness of 500 um
  3. 5-inch reticle ONLY
  4. The resist must be sensitive to the g-line (436 nm)