Click here to schedule training.
Please make training requests only when your need is imminent.
Be sure to include the following information with your request:
operating instructions go to the nanofab wiki (PennKey required for login).
- substrate type and size
- film stack
- etch depth/profile desired
The Technics is a plasma etcher. It is fitted with a 500 W RF generator at 13.56 MHz.
The following gases are available: SF6 and O2.
A base pressure of 250 mTorr can be reached with an Alcatel 2021 rotary vane pump.