Technics
Tool managers:
- Eric Johnston (ericdj[at]seas[dot]upenn[dot]edu)
- Nicholas Schneider (schnic[at]seas[dot]upenn[dot]edu)
- Chi-Mon Chen (chiche[at]seas[dot]upenn[dot]edu)
- Kim Venta (kimventa[at]sas[dot]upenn[dot]edu)
- Lauren Willis (willisl[at]sas[dot]upenn[dot]edu)
For operating instructions go to the nanofab wiki (PennKey required for login).
The Technics is a plasma etcher. It is fitted with a 500 W RF generator at 13.56 MHz.
The following gases are available: SF6 and O2.
A base pressure of 250 mTorr can be reached with an Alcatel 2021 rotary vane pump.