Thermionics Evaporator

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For operating instructions go to the nanofab wiki (PennKey required for login).

This is a home-built e-beam evaporator using a 3 kW Thermionics gun (model # RCL0305).
The tool uses a Cryo-Torr 8 for high vacuum pumping.

Material from up to five 2.2 cc crucibles can be sequentially evaporated in a single run.

The following materials are approved: Please contact Facility staff if the material you would like to evaporate is not listed above.

Coated graphite crucible liners are supplied by the Facility.