Click here to schedule training.
Please make training requests only when your need is imminent.
Be sure to include the following information with your request:
For operating instructions go to the nanofab wiki (PennKey required for login).
This is a home-built e-beam evaporator using a 3 kW Thermionics gun (model # RCL0305).
- substrate type and size
- film stack
- depostion layer desired
The tool uses a Cryo-Torr 8 for high vacuum pumping.
Material from up to five 2.2 cc crucibles can be sequentially evaporated in a single run.
The following materials are approved:
Please contact Facility staff if the material you would like to evaporate is not listed above.
- Al (Facility supplied)
- Au (Facility supplied)
- Ti (Facility supplied)
Coated graphite crucible liners are supplied by the Facility.