Photolithographic Processes for Creating a Proximity Sensor in Low Temperature Co-Fired Ceramic Tapes

8/5/99


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Table of Contents

Photolithographic Processes for Creating a Proximity Sensor in Low Temperature Co-Fired Ceramic Tapes

What is LTCC tape?

Comparison with Silicon

The Proximity Sensor

Why Photolithography?

The Processes

Photoformable Process

Photoformable Results

Photoformable Results (cont.)

DuPont Riston® 9015

Riston® Results

Riston® Results (cont.)

Conclusions

Acknowledgements

Author: user

Home Page: http://www.ee.upenn.edu/~sunfest

Other information:
These projects were done as part of an NSF REU program - SUNFEST99