ALD Standard Operating Procedure

Updated on 5/1/2017

Notes

Before using this tool you must have been properly trained by the tool manager.
These instructions are meant as a refresher to be used after the hands-on training given by the tool manager. Do not use the tool without having been trained on it.
If you have any questions contact Kyle (kckeenan@seas) or Hiro (hyam@seas).

Safety

Please read the Safety instructions located in Section 1 of the tool manual.

This system uses vacuum, high temperatures, and toxic, flammable, and pyrophoric (igniting in air spontaneously) materials.

Never leave flammable materials around the ALD. The tool gets hot enough to ignite materials like paper, cleanroom wipers, plastics and solvents.
Do no operate the tool overnight or unattended. You must be in the cleanroom while the tool is in use. If you need to step out please find another qualified ALD user to check on the tool.
Make sure there is someone else in the cleanroom while you use the tool.
Always wear gloves when using the ALD. Failure to so will expose you to dangerous materials.
Do not touch any of the many hot surfaces of the tool.
Do not set the temperature of the chamber heaters too high.
Changing to precursor cylinders is to be performed by Facility staff only.
Do not operate the manual valves on the precursor cylinders.
Do not change the temperature of the precursors.
Ask if in doubt! Do not guess or improvise.

1 Check-in

2 Loading Samples

3 Performing a Deposition

4 Unloading Samples

5 Placing the Tool in Standby Mode

6 Check-out

7 Creating a new Recipe

8 Supplemental Document

9 Troubleshooting

1. Check-in

1. Log-in on the ISIS scheduler.

2. Loading Samples

1. Ensure that no recipe is being run (“START RECIPE” must be read on the RECIPE button).

2. Ensure that the measured temperatures on heaters 6, 7, 8, 9 and 10 are set up at 150 °C.

3. Set up the N2 flow at 100 sccm.

4. Click the “VENT REACTOR” button.

5. Wait for the pressure to stabilize at 760 Torr.

6. Remove the large wire “basket” covering the process chamber.

7. Open the lid and quickly load your samples.

8. Close the lid and click the “PUMP REACTOR” button.

9. Place the basket on top of the tool.

10. Wait a few minutes with the flow at 100 sccm.

11. Set up the N2 flow at 20 sccm.

12. Wait for the base pressure to stabilize.

3. Performing a Deposition

1. Right click on the Process Sequence Table on the right side of the “Process” tab, so that a list of commands pops up.

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2. Select “Load recipe” to open a list of recipe files.

3. Choose a recipe file.

Note: If you want to make a new recipe, see the bottom of this page

4. Click the “START RECIPE” button.

Tip:

1. If the warning dialog box on "pressure too high error" shows up during run, click "OK".

2. Choose "System" from the drop down menu of Configuration in the menu.

3. The following dialog box appears.

4. Change the overpressure pressure threshold (Torr).

4. Unloading Samples

1. Ensure that the process has completed (“START RECIPE” must be read on the RECIPE button).

2. Set up the N2 flow at 100 sccm.

3. Click the “VENT REACTOR” button.

4. Wait for the pressure to stabilize at 760 Torr.

5. Remove the large wire “basket” covering the process chamber.

6. Open the lid and quickly unload your samples.

7. Close the lid and push the “PUMP REACTOR” button.

8. Place the basket on top of the tool.

9. Wait a few minutes with the N2 flow at 100 sccm.

10. Set up the N2 flow at 20 sccm.

11. Wait for the base pressure to stabilize.

5. Placing the Tool in Standby Mode

1. Ensure that no recipe is running (“START RECIPE” must be read on the RECIPE button).

2. Set heaters 6 through 10 at 150 °C.

3. Set heaters 11, 12, 14, and 16 at 0 °C.

4. Set heater 13 at 75 °C.

5. Set heater 15 at 75 °C.

6. Set up the N2 flow at 5 sccm.

6. Check-out

1. Log-out on the ISIS scheduler.

7. Creating a new Recipe

See Process Sequence Table.
If you create a new recipe, or edit an existing one, you must save that recipe in the “saved recipes” folder.
Do NOT overwrite an existing recipe.
It is helpful to also create a text file containing any notes for your recipe such as the flow rate (if not defined in the recipe) and how it differs from existing recipes.
Whichever recipe you use must be marked in the log, and must be available to the other users.

8. Supplemetal Documents

ALD Recipes

9. Troubleshooting

a) The pressure profile does not show the precursor pulse.

-> The precursor in the small tank may be run out. Consult the staff.

b) The sample piece moves around when the precursor and/or N2 gases are introduced.

-> Place the sample in a washer in the chamber.

c) The vacuum in the chamber is not good.

-> An O-ring might be deteriorated. Consult the staff.

-> A vacuum pump may be malfunctioning. Consult the staff.

d) Pressure sensor fails.

-> Reset the pressure sensor. Consult the satff.

Revisions

5/1/2017, by Hiro, added Troubleshooting