Updated on 1/21/2015
1 Check-in
2 Vent Chamber
3 Load Sample
4 Pump Down Chamber
5 Etching
5.1 Manual Operation
5.2 Auto Operation
5.2.1 Create Recipe
5.2.2 Run Recipe
6 Unload Sample
7 Stand by
8 Check Out
9 Supplemental Documents
1. Log-in on the ISIS scheduler
1. Touch the arrow in the "Recipe Name" box.
2. Choose the "VENT" from the pop-up list.
3. Touch the "Start Vacuum" button to start the "VENT" recipe.
* Make sure that the system is in the "Auto" mode under the "Start Vacuum" button.
* The chamber is evacuated in the beginning, but ends up with being vented.
4. The venting is done when "ATM" is shown on the screen.
1. Open the door, so that the venting valve is automatically closed (the green turns into the red).
2. Load the sample into the chamber.
3. Close the door.
1. Touch the arrow in the "Recipe Name" box.
2. Choose the "PUMP" from the pop-up list.
3. Touch the "Start Vacuum" button to start the "PUMP" recipe.
* Make sure that the system is in the "Auto" mode under the "Start Vacuum" button.
4. When the recipe is done at 10-20 mTorr, the following screen will appear, and a short alarm will sound.
5. Touch the "Exit" button.
1. Make sure that the chamber is pumped down.
2. Make sure that the system is in the manual mode.
3. Touch the "Menu Screen" button.
4. The menu screen appears.
5. Touch the "MANUAL" button.
6. The following screen appears.
7. Touch the number for time, RF power, or gas flow.
8. The following screen appears.
9. Input the time, RF power, and gas flow.
10. The manual operation can be done by touching the "Start", "Stop", or "Vent" button.
Note: If it does not work, log-in the system (see below).
1. Log-in the system.
1. Touch the "Set Process Parameters" button.
2. The following screen appears.
3. Touch the "Password" box.
4. The following screen appears.
5. Type "100" in, and touch the return button.
6. Touch the "OK" button in the following screen.
7. The system overview screen is back.
2. Open the "Set Process Parameters" screen.
1. Touch the "Menu Screen" button.
2. Touch the "SET PROCESS PARAMETERS" button.
3. The "Set Process Parameters" screen appears.
4. Choose Auto or Manual of Vent and System.
5. Touch the numbers for Time, RF, or gas flow.
6. The following screen appears.
7. Input the time, RF power, and gas flow.
3. Save the recipe created.
1. Touch the disc icon to save the recipe.
2. The following dialog box appears.
3. Touch the "Recipe Name" box.
4. The following screen appears.
5. Input the recipe name, and Touch the "OK" button.
6. Touch the "System Overview" button.
4. Log-out the system
1. Touch the "LOG OUT" button in the Menu, if necessary.
2. Touch the "SYSTEM OVERVIEW" button.
1. Make sure that the "Recipe Name" box shows the recipe desired.
2. If the "Recipe Name" box does not show the recipe desired, load the one desired, as shown above.
3. Make sure that the system is in the "Auto" mode.
4. Touch the "Start Vacuum" button to start the recipe.
5. The venting will automatically be done.
6. When the recipe is done, the following screen will appear, and a short alarm will sound.
7. Touch the "Exit" button.
1. Open the door, so that the venting valve is automatically closed (the green turns into the red).
2. Unload the sample from the chamber.
3. Close the door.
4. Run the "PUMP" recipe.
5. When the recipe is done, the following screen will appear, and a short alarm will sound.
6. Touch the "Exit" button.
1. Touch the "Stop Vacuum" button.
2. Make sure that all valves are closed.
1. Log-out on the ISIS scheduler
