Introduction of Soft Lithography

• "Soft Lithography" is normally termed for fabrication of microfluidic devices in the fields of chemistry, biochemistry, and medicine, and is based on rapid prototyping using negative photoresist SU-8, and on replica molding of poly(dimethylsiloxane) (PDMS) onto the SU-8 film patterned by UV lithography.
• The molded PDMS piece is cured, and is bonded with glass or other substrates to fabricate the microfluidic device.

References:

1. PDMSProcessing

2. Fabrication of microfluidic systems in poly(dimethylsiloxane)