Standard Operating Procedure of

March Jupiter II

Updated on 3/6/2019

Contents

1 Check-in

2 Load Sample

3 Set parameters

3-1 Power setup

3-2 O2 gas flow setup

3-3 Air gas flow setup

3-4 Multiple (O2 and air) gas flow setup

3-5 Set timer

4 Start process

5 Unload Sample

6 Check Out

Note:

• "O2" max flow (Switch "1") is 100 sccm at the scale of 500, i.e. 500 units = 100 sccm.
• "Air" max flow (Switch "2") is 250 sccm at the scale of 500, i.e. 500 units = 250 sccm.

1. Check-in

1. Log-in on the IRIS scheduler

2. Load Sample

1. Open the lid.

Note: The chamber is already vented.

2. Load the sample in the chamber.

3. Close the lid.

Note: The chamber will automatically be pumped down later.

3. Set parameters

3-1. Power setup

1. Setup the power level by rotating the knob while pressing the setpoint button. 

    You will see the power setting on the left top display.

3-2. O2 gas flow setup

1. Turn on a toggle switch "1".

2. Dial the right top knob to S1.

Note:

• R1: Reading
• S1: Setting
• PR: Pressure
• S3 to R4 are deactivated.

3. Adjust the O2 gas flow by rotating the flow control knob.  You can see the gas flow setting on the right top display.

Note: Keep "Auto Mode" on.

3-3. Air gas flow setup

1. Turn on a toggle switch "2".

2. Dial the right top knob to S2.

3. Adjust the air gas flow by rotating the flow control knob.  You can see the gas flow setting on the right top display.

Note: Keep "Auto Mode" on.

3-4. Multiple (O2 and air) gas flow setup

1. Turn on a toggle switch "1" for O2 gas setup.

2. Dial the right top knob to S1.

3. Adjust the air gas flow by rotating the flow control knob.  You can see the gas flow setting on the right top display.

4. Turn off a toggle switch "1".

4. Turn on toggle switches "2" for air gas setup.

5. Dial the right top knob to S2.

6. Adjust the air gas flow by rotating the flow control knob.  You can see the gas flow setting on the right top display.

7. Turn on a toggle switches "1" again, meaning that both of switch "1" and "2" must be "ON".

Note: Keep "Auto Mode" on.

3-5. Set timer

1. Make sure that "TIME" is set on EP SELECT.

2. Set the timer.

4. Start process

1. Press down the lid manually.

2. Press the "START" button, and the chamber is pumped down, O2 and/or air gas flows, and the O2 and/or air plasma is ignited automatically.

5. Unload sample

1. The chamber will be vented automatically.

2. Unload the sample

6. Check Out

1. Log-out the IRIS sheduler.