NX2600 Standard Operating Procedure

Updated on 5/17/2018

Contents

1 Nanoimprint Module

1.1 Thermal Imprint

1.2 UV Imprint

2 Supplemental Documents

1. Nanoimprint Module

1.1 Thermal Imprint

1.2 UV Imprint

2. Supplemental Documents

NX2600 Recipes

Revision

5/17/2018, by Hiro, Remove the Alignment Module section.