P7 2D Scan

Updated on 12/19/2014

Contents

1 The "Catalog" Window

2 Load Sample

3 Scan Surface Profile

3.1 Choose Recipe

3.2 Set Scan Parameters

3.3 View The Surface

3.4 Start Scan

3.5 Level Scan

4 Measure Surface Profile

5 Save Surface Profile

6 Print Surface Profile

7 Unload Sample

1. The "Catalog" Window

1. You will see the "Catalog" window.

2. Click the light-blue "Scan" icon on the right side, and the "Scan Recipe" button on the left side.

• If you use the P7 2D profiler, then 3D scan option is not available.
• If you use the P7 2D&3D profiler, then click the "2D" button in the Menu,

2. Load Sample

1. Open the front door.

2. Ensure that a sample chuck is in a loading position (close to the window).

3. If not, choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu.

4. The sample chuck is moved automatically to the loading position.

5. Load your sample on the sample chuck.

• NOTE: The sample MUST be placed on the center of the chuck.

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6. Turn on the stage vacuum if necessary.

• The size for the stage vacuum is 2" x 2".

7. Close the front door.

8. Choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu again.

9. The sample chuck is moved automatically beneath the stylus.

3. Scan Surface Profile

3.1 Choose Recipe

1. Choose "NORMAL OPERATION" from the "Normal Operation" directory.

• This is a default recipe. You can change the parameters for your scan, but not save the recipe.
• If you use the P7 2D and 3D profiler, then choose "NORMAL OPERATION 2D".

2. Click the "View/Modify" button.

3. The "Security Information" dialog box appears. Click "OK".

3.2 Set Scan Parameters

1. The "Recipe Editor" window shows up.

• The scanning parameters are determined on the following screen for the "Scan Preparation Definition" button.
• The screens for the other buttons are set up for the data output. If you check the film thickness only, then you do not have to touch them.

2. Input the parameters, and click the "X/Y view screen" icon.

3.3 View The Surface

1. The CCD image window ("Teach Scan Length") appears.

• NOTE: The safe area can be set up from the drop-down menu shown by right-click of the mouse on the right disc image, so that the stylus cannot go beyond the safe area, and the risk of damaging the stylus can be minimized. The default setting is 2". See Safe Area.

2. Click the "FOCUS" icon.

3. The stylus is moved down automatically to focus the image on the surface.

• The blue arrow in the image indicates the 500 um length scanning line.

4. You can use arrows in the screen menu or the key board to move the chuck.

5. You can also rotate the chuck manually, using the bar (coarse adjustment) and knob (fine adjustment) under the chuck.

6. The scan length and location can be changed on the image by the mouse.

• To change the location, left-click the mouse on the location where you want to change.
• To change the scan length, left-click the mouse on the starting location, and drag the cursor to the ending location while holding the left button of the mouse.
  • The scan length changed is also shown on the "Recipe Editor" window.

3.4 Start Scan

1. Start a scan by clicking the "START" button on the "Catalog", "Recipe Editor", or "Teach Scan Length" window.

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2. The tip of the stylus is not shown on the CCD image during the scanning.

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3. The following window appears when the scanning ends.

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3.5 Level Scan

1. Click "Level" in the Menu.

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2. Move the "Level" blocks to the locations where you want to level.

• The width of the block can be changed.

3. Click "Level" in the Menu again.

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4. The leveling is done.

4. Measure Surface Profile

1. Move the "Meas" blocks to measure height and/or width of the profile.

• The width of the block can be changed.

2. The measured results are shown on the left column.

• NOTE: If you need the more detailed analysis, then your have to set up some items on the data output on the "Recipe Editor" window, using the screens other than the "Scan Preparation Definition" one, as shown above. This info is shown on the "2D Surface Parameter Summary" window.

5. Save Surface Profile

1. Choose and click "Save Data" from the drop-down menu of File in the Menu. 

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2. The data is saved in the "scandata" directory.  You can also save this onto your USB memory.

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3. You can call your data from the "Scan Data" screen in the "Catalog" window.

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4. The .dat file exported from this program has been known to cause issues when opening up in other programs on your personal computer. The following steps allow you to export the graph and a .txt file to analyze the data, using Apex 2D application.

1. Click icon in the top menu of the Analysis window.

2. This will open the data as a graph in Apex 2D as shown below. You can analyze your data further in this software. To export as a text, click on the "Save current studiable" icon shown below.

3. Save the file type to a "TXT-Ascii Surfaces". The resulting text file will have a column with distance, and the second column tab delimited with the depth measurements as shown below.

4. You can export the graph by clicking File -> Print a page as an image...

6. Print Surface Profile

1. Click "File" in the menu on the "Scan Data" screen on the "Catalog" window.

2. Choose the data from the right box.

2. Choose how to print or output the data.

7. Unload Sample

1. Choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu.

2. The sample chuck is moved automatically to the loading position.

3. Take out your sample.

4. Close the front door.