Post-measurement

Contents

1 Choose Recipe

2 Set Scan Parameters

3 View The Surface

4 Start Scan

5 Save the measured result

1. Choose Recipe

1. Choose "NORMAL OPERATION STRESS 4INCH".

• This is a default recipe for 4" wafer.

2. Click the "View/Modify" button.

2. Set Scan Parameters

1. The "Stress" window shows up.

2. If. If you change the parameters, ensure that the recipe is saved with the different name.

• Otherwise, the previous recipe will be carried out.

3. View The Surface

1. Click the icon.

2. The CCD image window ("Teach Scan Length") appears.

• NOTE: The safe area can be set up from the drop-down menu shown by right-click of the mouse on the right disc image, so that the stylus cannot go beyond the safe area, and the risk of damaging the stylus can be minimized. The default setting is 2". See Safe Area.

2. Click the "FOCUS" icon.

3. The stylus is moved down automatically to focus the image on the surface.

4. Start Scan

1. Start a scan by clicking the "START" button.

2. The "Enter Scan ID" dialog box appears.

3. Save the name of pre-measurement data.

4. The tip of the stylus is not shown on the CCD image during the scanning.

5. The following window appears when the scanning ends.

5. Save the measured result

1. Click "Stress" in the menu, and choose "Stress Data Catalog" from the drop-down menu.

2. The "Stress Data" screen of the Catalog window appears.

3. Click the "Set Post" button, so that the data is saved as post-scan data on the Stress Data, and the Post Scan box shows the data name of the post-measurement.