Spray Coater Standard Operating Procedure

Updated on 2/4/2021

Note:  Please consult the staff about a resist solution desired and a new recipe. 

• You are not allowed to replace the resist solution or to create the new recipe.

Contents

1 Check-in

2 Cold Start

3 Load Sample

4 Load Recipe and Run

5 Unload Sample

6 Cleaning

7 Check-out

1. Check-in

1. Log-in on the ISIS scheduler. 

2. Cold Start

1. Touch the "Init" button for System Initialization.  Wait until the initialization is finished.

2. Touch the "Analog" button.

3. Temperature Overview window appears.  Check the temperature of the chuck.

4. Touch the "Close" button.

3. Load Sample

1. Open the door of the chamber.

2. Remove a blank wafer from the three pins up. 

3. Place a wafer on the three pins.

4. Move the pins down using the "Move Pins Down" button.

5. Make sure that the wafer is correctly positioned on the chuck. 

• Once the wafer is placed on the chuck, the wafer vacuum is ON.
• If the wafer is not positioned correctly, move the pins up to adjust the position.

6. Close the door of the chamber.

4. Load Recipe and Run

1. Double-touch on this icon of the screen.

2. The following dialog box appears.

3. Touch the "Send Recipes" button.

4. The following dialog box appears.

5. Choose the recipe from the list.

• The default recipes are "4pass_4inch_nozzle1" and "4pass_4inch_nozzle2".
• Nozzle 1: S1813 diluted by solvent
• Nozzle 2: SU-8 diluted by solvent
• If you have some request on resist solution or the recipe, please consult the staff about it.

6. Touch the "Send" button.

7. The following dialog box appears.

8. Touch the "Start" button to run the recipe.

9. The three pins are moved up at the end of run.

5. Unload Sample

1. Open the door of the chamber.

2. Remove the sample from the three pins.

6. Cleaning

1. Place a blank wafer on the three pins.

2. Move the pins down.

3. Close the door of the chamber.

4. Open the "Send Recipe" dialog box again.

5. Choose "Clean" from the list.

6. Run the "Clean" recipe.

7. Remove wafer 

8. Move the pins down using the "Move Pins Down" button. 

9. Soak an Alpha Wipe with acetone and wipe chuck area normally covered by wafer, including vacuum grooves, until clean 

10. Move the pins up using the "Move Pins Up" button.

7. Check-out

1. Log-out on the ISIS scheduler. 

Revisions

2/4/2021, by Hiro, added in 6 cleaning according to Kyle's request.