XeF2 Standard Operating Procedure

Updated on 5/1/2017

Contents

1 Log in

2 Check the pressure sensor and load the sample

3 Etch the sample

4 Unload the sample and log out

5 Pressure Sensor Calibration

6 Supplemental Documents

7 Troubleshooting

1. Log in

1. Type your “Username” and “Password” in login menu and click "Login" button in order to start using the tool.

• Note: if the login menu is not displayed on the screen, launch the Xetch software. Select “Normal” in the “Machine Startup Options” window, and allow the startup routine to complete. The login menu will be displayed.

2. Check the pressure sensor and load the sample

1. Check "Last sensor calibration" time on the right top of the following Main Menu.

2. If it is more than 3 days, it is necessary to perform the pressure sensor re-calibration procedure, posted on the bottom of this page, before starting the etching procedure.

3. Otherwise, click “Load/Unload sample” button in the Main Menu.

4. The system will prompt to ensure a correct decision "Yes" or "No".

5. Press YES, so that the system will begin chamber purges and flushing cycles to evacuate the chamber.

6. When the chamber is vented, the following dialog box will appear.

7. Open the chamber lid.

8. Load the sample.

9. Close the lid.

10. Press “Done” button in the dialog box, so that the system will repeat a purge-and-pump down cycle, and will be back to the Main Menu.

• Note: the “Examine” button only pumps the chamber down, without purges, so that the system can be quickly vented to load the sample. This is very useful when examining a sample away from the system to prevent moisture from accumulating in the chamber. However, it is always necessary to press “Done” before etching the sample.

3. Etch the sample

1. Click “Etch Menu” button in the Main Menu.

2. The system will prompt the lot number.

3. Type the lot number, and click "Done" button.

4. The Etch Menu shows up. Put the desired value of “# of Cycles”, “Etch Time”, “XeF2 Pressure” and “N2 Pressure” (see XeF2 Recipes).

• Note: It is possible to select a pre-saved recipe from the “Current Recipe” pull-down menu (left-top of the window).

5. Select “Normal” in the “Etch Mode” pull-down menu (bottom of the window).

6. Click the “Start Etch” button.

7. When the etching starts, all of the controls will be disabled except for the “Stop Button”.

Note:

• Two counters on the right bottom of the screen:
  • The first counter displays how much time has elapsed during the etch portion of the cycle.
  • The second counter shows the number of cycles completed.
• The “CHANGE CYCLES” button can be used to add cycles to the etch in-progress at any time during an etch. Once selected, the “Change # of Cycles Menu” is prompted. The top row of arrows will add cycles in this order, (right to left); the lower row of arrows will remove cycles.
• The “STOP” button is used to end the etch prematurely.
  • If the “STOP” button is pressed once, the Xetch will allow the current cycle to finish before ending the entire etch.
  • If the “STOP” button is pressed twice, the Xetch will prompt the dialog box asking “Yes, Hard Stop” or “No, Keep Waiting”.
    • “Yes, Hard Stop” will end the etch cycle immediately and return the user to the main menu.
    • “No, Keep Waiting” will complete only the current cycle before returning the user to the main menu.

• During the “Etch pre-cycles”, the system tests the expansion chamber fill pressures before exposing the samples to process gas. Sometimes while performing the etch pre-cycles, the set values for XeF2 and N2 pressures can not be reached/read inside the “Expansion Chamber” (it is possible to monitor the pressure inside the expansion chamber by looking at the left pressure gauge: “Exp Pressure”). Therefore, if the etch pre-cycles take a lot of time (more than 15 minutes) or the “Exp Pressure” indicator keeps still on a wrong value, perform an “Hard Stop” and start the etching procedure again.

8. After the etch process is completed, the Main Menu is displayed.

4. Unload the sample and log out

1. Unload he sample, as described in 2. Check the pressure sensor and load the sample.

2. Press “Done” button in the dialog box after closing the lid, so that the system will repeat a purge-and-pump down cycle, and will be back to the Main Menu.

3. Click "Log Out" in the Main Menu.

4. Do not close the software, do not turn the computer off and do not turn the power off.

5. Record the recipe in the log file on the computer.

5. Pressure Sensor Calibration

1. Click “Maintenance Menu” button in the Main Menu.

2. Click “Gauge Recalibrate” button in the Maintenance Menu.

3. Click “Start Test” button at the bottom of Pressure Sensor Recalibration Utility screen.

4. The calibration takes one hour; once it has been completed the “Main Menu” will be displayed again.

6. Supplemental Documents

• XeF2 Recipes

7. Troubleshooting

a) The chamber cannot be pumped down properly even though the vacuum pump runs fine.

-> Log-out and log-in the IRIS system again, and the system should be fine.  The cause is unknown.

Revision

5/1/2017, by Hiro, added troubleshooting.