Elionix Standard Operating Procedure

Updated on 4/13/2018

Tool Reservation rules:
1. Weekly quota in effect for all Elionix users:
          8hrs prime time & 8hrs non prime time
          OR
          16hrs non prime time (you must chose one or the other).

    Week = 12am Sunday - 11:59pm Saturday
    Prime time = 9am-9pm M-F

2. Unused time slots may be reserved by anyone and will not be counted against your weekly quota if:
          -You reserve the time slot no sooner than 3hrs before it begins; be sure to write "(unused)" in the reservation text
          -You send email notification of such reservations to: kckeenan@seas.upenn.edu

ELS-7500EX specifications:

• Minimum linewidth: 10 nm (at 50 kV in 75 μm x 75 μm field)
• Stitching accuracy: 50 nm
• Overlay accuracy: 60 nm
• Beam current: 1 pA to 50 nA (at 50 kV)
• Minimum beam diameter: 2 nm (at 50 kV)
• Minimum dwell time: 0.1 μs
• Exposure field size: 75 μm x 75 μm, 150 μm x 150 μm, 300 μm x 300 μm, 600 μm x 600 μm, 1200 μm x 1200 μm, 2400 μm x 2400 μm

The following flow chart indicates the brief operating procedure of Elionix ELS-7500EX E-beam writer when using gds or dxf CAD file:

• The sequence of "Adjust The Sample Height" and "Set Beam Current" is not important.
• Reg-A and Reg-B marks are global alignment marks.

‎ 

1. Non-alignment procedure

2. Alignment Procedure

3. Troubleshooting

a) Height sensor does not respond. 

    -> When the sample is small, this sometimes happens. Move X and/or Y position of the stage, see if the beam current can be detected.

b) The stage does not move.

    -> Re-boot the whole system.  Consult the staff.

Remarks

• The above procedure covers the basic operation of the EBL tool.
• The tool guru will provide more advanced in-person training to individual users.
• CAD design and the setting of the schedule file will also be covered during in-person training sessions.

Revisions

4/13/2018, by Hiro, rev ised the flow chart

5/1/2017, by Hiro, added Troubleshooting